JPS5283079A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5283079A JPS5283079A JP15929375A JP15929375A JPS5283079A JP S5283079 A JPS5283079 A JP S5283079A JP 15929375 A JP15929375 A JP 15929375A JP 15929375 A JP15929375 A JP 15929375A JP S5283079 A JPS5283079 A JP S5283079A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- forming
- encircled
- improvement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To achieve the reduction in leakage current and improvement in reverse dielectric strength by forming single crystal Si islands whose side faces and bottom are encircled with a porous insulator film and forming mutually isolated island regions.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15929375A JPS5283079A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15929375A JPS5283079A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5283079A true JPS5283079A (en) | 1977-07-11 |
Family
ID=15690618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15929375A Pending JPS5283079A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5283079A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107645A (en) * | 1981-12-22 | 1983-06-27 | Clarion Co Ltd | Manufacture of semiconductor device |
-
1975
- 1975-12-29 JP JP15929375A patent/JPS5283079A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107645A (en) * | 1981-12-22 | 1983-06-27 | Clarion Co Ltd | Manufacture of semiconductor device |
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