JPS5277683A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5277683A JPS5277683A JP15518475A JP15518475A JPS5277683A JP S5277683 A JPS5277683 A JP S5277683A JP 15518475 A JP15518475 A JP 15518475A JP 15518475 A JP15518475 A JP 15518475A JP S5277683 A JPS5277683 A JP S5277683A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- insulator layer
- oxidizing
- separation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To get high integration semiconductor device with decreased amount of crystal defect and good characteristics by oxidizing with hydrochloric acid this insulator layer in case of separation with insulator layer among elements in the semiconductor device.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15518475A JPS5277683A (en) | 1975-12-24 | 1975-12-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15518475A JPS5277683A (en) | 1975-12-24 | 1975-12-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5277683A true JPS5277683A (en) | 1977-06-30 |
Family
ID=15600310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15518475A Pending JPS5277683A (en) | 1975-12-24 | 1975-12-24 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5277683A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5456776A (en) * | 1977-10-14 | 1979-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semicondutor integrated circuit |
-
1975
- 1975-12-24 JP JP15518475A patent/JPS5277683A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5456776A (en) * | 1977-10-14 | 1979-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semicondutor integrated circuit |
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