JPS5277683A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5277683A
JPS5277683A JP15518475A JP15518475A JPS5277683A JP S5277683 A JPS5277683 A JP S5277683A JP 15518475 A JP15518475 A JP 15518475A JP 15518475 A JP15518475 A JP 15518475A JP S5277683 A JPS5277683 A JP S5277683A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
insulator layer
oxidizing
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15518475A
Other languages
Japanese (ja)
Inventor
Tsutomu Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15518475A priority Critical patent/JPS5277683A/en
Publication of JPS5277683A publication Critical patent/JPS5277683A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To get high integration semiconductor device with decreased amount of crystal defect and good characteristics by oxidizing with hydrochloric acid this insulator layer in case of separation with insulator layer among elements in the semiconductor device.
COPYRIGHT: (C)1977,JPO&Japio
JP15518475A 1975-12-24 1975-12-24 Manufacture of semiconductor device Pending JPS5277683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15518475A JPS5277683A (en) 1975-12-24 1975-12-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15518475A JPS5277683A (en) 1975-12-24 1975-12-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5277683A true JPS5277683A (en) 1977-06-30

Family

ID=15600310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15518475A Pending JPS5277683A (en) 1975-12-24 1975-12-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5277683A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456776A (en) * 1977-10-14 1979-05-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semicondutor integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456776A (en) * 1977-10-14 1979-05-08 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semicondutor integrated circuit

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