JPS5370676A - Production of semiconductor element - Google Patents

Production of semiconductor element

Info

Publication number
JPS5370676A
JPS5370676A JP14629576A JP14629576A JPS5370676A JP S5370676 A JPS5370676 A JP S5370676A JP 14629576 A JP14629576 A JP 14629576A JP 14629576 A JP14629576 A JP 14629576A JP S5370676 A JPS5370676 A JP S5370676A
Authority
JP
Japan
Prior art keywords
production
semiconductor element
reducing
increase
production process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14629576A
Other languages
Japanese (ja)
Inventor
Kazuhisa Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP14629576A priority Critical patent/JPS5370676A/en
Publication of JPS5370676A publication Critical patent/JPS5370676A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To realize the production process of semiconductor elements capable of reducing the quantity of traps produced in bevel regions and reducing the increase in inverse leakage current.
JP14629576A 1976-12-06 1976-12-06 Production of semiconductor element Pending JPS5370676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14629576A JPS5370676A (en) 1976-12-06 1976-12-06 Production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14629576A JPS5370676A (en) 1976-12-06 1976-12-06 Production of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5370676A true JPS5370676A (en) 1978-06-23

Family

ID=15404439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14629576A Pending JPS5370676A (en) 1976-12-06 1976-12-06 Production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5370676A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263480A (en) * 1984-06-12 1985-12-26 Toshiba Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263480A (en) * 1984-06-12 1985-12-26 Toshiba Corp Semiconductor device

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