JPS54162492A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS54162492A
JPS54162492A JP7175578A JP7175578A JPS54162492A JP S54162492 A JPS54162492 A JP S54162492A JP 7175578 A JP7175578 A JP 7175578A JP 7175578 A JP7175578 A JP 7175578A JP S54162492 A JPS54162492 A JP S54162492A
Authority
JP
Japan
Prior art keywords
main surface
diffusion
resistances
diaphragm
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7175578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153872B2 (enrdf_load_stackoverflow
Inventor
Toru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7175578A priority Critical patent/JPS54162492A/ja
Publication of JPS54162492A publication Critical patent/JPS54162492A/ja
Publication of JPS6153872B2 publication Critical patent/JPS6153872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP7175578A 1978-06-13 1978-06-13 Semiconductor pressure transducer Granted JPS54162492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7175578A JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7175578A JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS54162492A true JPS54162492A (en) 1979-12-24
JPS6153872B2 JPS6153872B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=13469659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7175578A Granted JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS54162492A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077470A (ja) * 1983-10-04 1985-05-02 Nec Corp ダイアフラム型半導体圧力センサ
US4622098A (en) * 1982-10-27 1986-11-11 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing semiconductor strain sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536777U (ja) * 1991-10-18 1993-05-18 菊水電子工業株式会社 コネクタの抜け止め防止装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622098A (en) * 1982-10-27 1986-11-11 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing semiconductor strain sensor
JPS6077470A (ja) * 1983-10-04 1985-05-02 Nec Corp ダイアフラム型半導体圧力センサ

Also Published As

Publication number Publication date
JPS6153872B2 (enrdf_load_stackoverflow) 1986-11-19

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