JPS6153872B2 - - Google Patents

Info

Publication number
JPS6153872B2
JPS6153872B2 JP7175578A JP7175578A JPS6153872B2 JP S6153872 B2 JPS6153872 B2 JP S6153872B2 JP 7175578 A JP7175578 A JP 7175578A JP 7175578 A JP7175578 A JP 7175578A JP S6153872 B2 JPS6153872 B2 JP S6153872B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure transducer
semiconductor pressure
diffusion
diffused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7175578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54162492A (en
Inventor
Tooru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7175578A priority Critical patent/JPS54162492A/ja
Publication of JPS54162492A publication Critical patent/JPS54162492A/ja
Publication of JPS6153872B2 publication Critical patent/JPS6153872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP7175578A 1978-06-13 1978-06-13 Semiconductor pressure transducer Granted JPS54162492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7175578A JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7175578A JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS54162492A JPS54162492A (en) 1979-12-24
JPS6153872B2 true JPS6153872B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=13469659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7175578A Granted JPS54162492A (en) 1978-06-13 1978-06-13 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS54162492A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536777U (ja) * 1991-10-18 1993-05-18 菊水電子工業株式会社 コネクタの抜け止め防止装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130435B (en) * 1982-10-27 1986-10-15 Tokyo Shibaura Electric Co Semiconductor strain sensor and method for manufacturing the same
JPS6077470A (ja) * 1983-10-04 1985-05-02 Nec Corp ダイアフラム型半導体圧力センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536777U (ja) * 1991-10-18 1993-05-18 菊水電子工業株式会社 コネクタの抜け止め防止装置

Also Published As

Publication number Publication date
JPS54162492A (en) 1979-12-24

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