JPS54155062A - Focus inspection method - Google Patents
Focus inspection methodInfo
- Publication number
- JPS54155062A JPS54155062A JP6287578A JP6287578A JPS54155062A JP S54155062 A JPS54155062 A JP S54155062A JP 6287578 A JP6287578 A JP 6287578A JP 6287578 A JP6287578 A JP 6287578A JP S54155062 A JPS54155062 A JP S54155062A
- Authority
- JP
- Japan
- Prior art keywords
- light source
- reflected
- lens
- inspected
- point light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
PURPOSE: To also inspect spherical aberration with a focus, by collecting lights from a point light source by means of a lens to be inspected, by reflecting reflected lights from a specular surface by means of a mirror mounted near the point light source and by detecting the reflected light patterns.
CONSTITUTION: A light source from a point light source O focussed by menas of a lens L1 is focussed by means of a lens L2 to be inspected, image formed on a focal plane R and reflected. The reflected lights go back on the same light course, are reflected by means of a mirror M installed near the point light source O and form pattern light images on a detecting surface D built up by means of two symmetrical surface A, B. When deciding patterns by the visual identification of the pattern light images or light receiving detecting signals, spherical aberration can also be inspected accurately and easily by simple constitution with the focal plane of the lens to be inspected.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6287578A JPS54155062A (en) | 1978-05-26 | 1978-05-26 | Focus inspection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6287578A JPS54155062A (en) | 1978-05-26 | 1978-05-26 | Focus inspection method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54155062A true JPS54155062A (en) | 1979-12-06 |
Family
ID=13212869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6287578A Pending JPS54155062A (en) | 1978-05-26 | 1978-05-26 | Focus inspection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54155062A (en) |
-
1978
- 1978-05-26 JP JP6287578A patent/JPS54155062A/en active Pending
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