JPS54155062A - Focus inspection method - Google Patents

Focus inspection method

Info

Publication number
JPS54155062A
JPS54155062A JP6287578A JP6287578A JPS54155062A JP S54155062 A JPS54155062 A JP S54155062A JP 6287578 A JP6287578 A JP 6287578A JP 6287578 A JP6287578 A JP 6287578A JP S54155062 A JPS54155062 A JP S54155062A
Authority
JP
Japan
Prior art keywords
light source
reflected
lens
inspected
point light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6287578A
Other languages
Japanese (ja)
Inventor
Hironori Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6287578A priority Critical patent/JPS54155062A/en
Publication of JPS54155062A publication Critical patent/JPS54155062A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE: To also inspect spherical aberration with a focus, by collecting lights from a point light source by means of a lens to be inspected, by reflecting reflected lights from a specular surface by means of a mirror mounted near the point light source and by detecting the reflected light patterns.
CONSTITUTION: A light source from a point light source O focussed by menas of a lens L1 is focussed by means of a lens L2 to be inspected, image formed on a focal plane R and reflected. The reflected lights go back on the same light course, are reflected by means of a mirror M installed near the point light source O and form pattern light images on a detecting surface D built up by means of two symmetrical surface A, B. When deciding patterns by the visual identification of the pattern light images or light receiving detecting signals, spherical aberration can also be inspected accurately and easily by simple constitution with the focal plane of the lens to be inspected.
COPYRIGHT: (C)1979,JPO&Japio
JP6287578A 1978-05-26 1978-05-26 Focus inspection method Pending JPS54155062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6287578A JPS54155062A (en) 1978-05-26 1978-05-26 Focus inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6287578A JPS54155062A (en) 1978-05-26 1978-05-26 Focus inspection method

Publications (1)

Publication Number Publication Date
JPS54155062A true JPS54155062A (en) 1979-12-06

Family

ID=13212869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6287578A Pending JPS54155062A (en) 1978-05-26 1978-05-26 Focus inspection method

Country Status (1)

Country Link
JP (1) JPS54155062A (en)

Similar Documents

Publication Publication Date Title
KR960008272A (en) Optical inspection of vessel finish dimension parameters
JPS55142254A (en) Inspecting method for pattern of printed wiring board
ES8500445A1 (en) Optical detection of radial reflective defects
GB2126712A (en) Surface flaw inspection apparatus for a convex body
BR9403582A (en) Apparatus for detecting flaws and / or split seams in a translucent container and method of inspection of translucent containers
JPS55146046A (en) Measuring method of golf ball spin amount
JPS54155062A (en) Focus inspection method
JPS55149830A (en) Inspection apparatus for appearance of spherical body
JPS6488327A (en) Shape measuring method for interference wave front
JPS5686340A (en) Automatic detector for foreign matter
JPS649306A (en) Detector for light transmitting fine pattern
JPS55117946A (en) Flaw detection method of hollow shaft inside surface
JPS6488237A (en) Surface inspecting apparatus
JPS5533679A (en) Measuring method of distance
JPS57186106A (en) Inspection device for surface
JPS57148233A (en) Testing method and device for hardness
JPS6423145A (en) Optical appearance inspection device
JPS57166547A (en) Apparatus for reflective spectrophotometry
JPS5728239A (en) Inspection of defect on cylinder surface
JPS5693006A (en) Optical system for reading scale on theodolite
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS57173705A (en) Method for checking mask for printed substrate
JPS57189046A (en) Inspecting device for surface defect
JPS55124008A (en) Defect inspecting apparatus
JPH09326030A (en) Rubber seal inspecting device