JPS54150971A - Liquid-phase epitaxial growth method for semiconductor element - Google Patents
Liquid-phase epitaxial growth method for semiconductor elementInfo
- Publication number
- JPS54150971A JPS54150971A JP5886578A JP5886578A JPS54150971A JP S54150971 A JPS54150971 A JP S54150971A JP 5886578 A JP5886578 A JP 5886578A JP 5886578 A JP5886578 A JP 5886578A JP S54150971 A JPS54150971 A JP S54150971A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- aperture
- impurity
- hole
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5886578A JPS54150971A (en) | 1978-05-19 | 1978-05-19 | Liquid-phase epitaxial growth method for semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5886578A JPS54150971A (en) | 1978-05-19 | 1978-05-19 | Liquid-phase epitaxial growth method for semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54150971A true JPS54150971A (en) | 1979-11-27 |
Family
ID=13096611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5886578A Pending JPS54150971A (en) | 1978-05-19 | 1978-05-19 | Liquid-phase epitaxial growth method for semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54150971A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4944517U (ja) * | 1972-07-21 | 1974-04-19 | ||
JPS5081677A (ja) * | 1973-11-15 | 1975-07-02 | ||
JPS51111476A (en) * | 1975-03-26 | 1976-10-01 | Sumitomo Electric Ind Ltd | Method of liquid phase epitaxial crystal growth |
-
1978
- 1978-05-19 JP JP5886578A patent/JPS54150971A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4944517U (ja) * | 1972-07-21 | 1974-04-19 | ||
JPS5081677A (ja) * | 1973-11-15 | 1975-07-02 | ||
JPS51111476A (en) * | 1975-03-26 | 1976-10-01 | Sumitomo Electric Ind Ltd | Method of liquid phase epitaxial crystal growth |
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