JPS54150376A - Liquid phase epitaxial growth apparatus - Google Patents
Liquid phase epitaxial growth apparatusInfo
- Publication number
- JPS54150376A JPS54150376A JP5956078A JP5956078A JPS54150376A JP S54150376 A JPS54150376 A JP S54150376A JP 5956078 A JP5956078 A JP 5956078A JP 5956078 A JP5956078 A JP 5956078A JP S54150376 A JPS54150376 A JP S54150376A
- Authority
- JP
- Japan
- Prior art keywords
- melt
- type
- room
- vessel
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 title 1
- 239000000155 melt Substances 0.000 abstract 8
- 239000000758 substrate Substances 0.000 abstract 4
- 238000011109 contamination Methods 0.000 abstract 1
- 239000002019 doping agent Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956078A JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5956078A JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54150376A true JPS54150376A (en) | 1979-11-26 |
JPS6128635B2 JPS6128635B2 (enrdf_load_stackoverflow) | 1986-07-01 |
Family
ID=13116746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5956078A Granted JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54150376A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164525A (en) * | 1980-04-23 | 1981-12-17 | Philips Nv | Board for liquid epitaxial growth unit and method of growing semiconductor material layer using same |
-
1978
- 1978-05-18 JP JP5956078A patent/JPS54150376A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56164525A (en) * | 1980-04-23 | 1981-12-17 | Philips Nv | Board for liquid epitaxial growth unit and method of growing semiconductor material layer using same |
Also Published As
Publication number | Publication date |
---|---|
JPS6128635B2 (enrdf_load_stackoverflow) | 1986-07-01 |
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