JPS54150376A - Liquid phase epitaxial growth apparatus - Google Patents

Liquid phase epitaxial growth apparatus

Info

Publication number
JPS54150376A
JPS54150376A JP5956078A JP5956078A JPS54150376A JP S54150376 A JPS54150376 A JP S54150376A JP 5956078 A JP5956078 A JP 5956078A JP 5956078 A JP5956078 A JP 5956078A JP S54150376 A JPS54150376 A JP S54150376A
Authority
JP
Japan
Prior art keywords
melt
type
room
vessel
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5956078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6128635B2 (enrdf_load_stackoverflow
Inventor
Takao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP5956078A priority Critical patent/JPS54150376A/ja
Publication of JPS54150376A publication Critical patent/JPS54150376A/ja
Publication of JPS6128635B2 publication Critical patent/JPS6128635B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP5956078A 1978-05-18 1978-05-18 Liquid phase epitaxial growth apparatus Granted JPS54150376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5956078A JPS54150376A (en) 1978-05-18 1978-05-18 Liquid phase epitaxial growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5956078A JPS54150376A (en) 1978-05-18 1978-05-18 Liquid phase epitaxial growth apparatus

Publications (2)

Publication Number Publication Date
JPS54150376A true JPS54150376A (en) 1979-11-26
JPS6128635B2 JPS6128635B2 (enrdf_load_stackoverflow) 1986-07-01

Family

ID=13116746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5956078A Granted JPS54150376A (en) 1978-05-18 1978-05-18 Liquid phase epitaxial growth apparatus

Country Status (1)

Country Link
JP (1) JPS54150376A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164525A (en) * 1980-04-23 1981-12-17 Philips Nv Board for liquid epitaxial growth unit and method of growing semiconductor material layer using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164525A (en) * 1980-04-23 1981-12-17 Philips Nv Board for liquid epitaxial growth unit and method of growing semiconductor material layer using same

Also Published As

Publication number Publication date
JPS6128635B2 (enrdf_load_stackoverflow) 1986-07-01

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