JPS6128635B2 - - Google Patents
Info
- Publication number
- JPS6128635B2 JPS6128635B2 JP5956078A JP5956078A JPS6128635B2 JP S6128635 B2 JPS6128635 B2 JP S6128635B2 JP 5956078 A JP5956078 A JP 5956078A JP 5956078 A JP5956078 A JP 5956078A JP S6128635 B2 JPS6128635 B2 JP S6128635B2
- Authority
- JP
- Japan
- Prior art keywords
- melt
- storage chamber
- substrate
- type
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 239000000155 melt Substances 0.000 claims description 37
- 239000007791 liquid phase Substances 0.000 claims description 7
- 229910005540 GaP Inorganic materials 0.000 description 14
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5956078A JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5956078A JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54150376A JPS54150376A (en) | 1979-11-26 |
| JPS6128635B2 true JPS6128635B2 (enrdf_load_stackoverflow) | 1986-07-01 |
Family
ID=13116746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5956078A Granted JPS54150376A (en) | 1978-05-18 | 1978-05-18 | Liquid phase epitaxial growth apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54150376A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2481325A1 (fr) * | 1980-04-23 | 1981-10-30 | Radiotechnique Compelec | Nacelle utilisable pour des depots epitaxiques multicouches en phase liquide et procede de depot mettant en jeu ladite nacelle |
-
1978
- 1978-05-18 JP JP5956078A patent/JPS54150376A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54150376A (en) | 1979-11-26 |
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