JPS5414170A - Exposure method of electron beam - Google Patents

Exposure method of electron beam

Info

Publication number
JPS5414170A
JPS5414170A JP8029777A JP8029777A JPS5414170A JP S5414170 A JPS5414170 A JP S5414170A JP 8029777 A JP8029777 A JP 8029777A JP 8029777 A JP8029777 A JP 8029777A JP S5414170 A JPS5414170 A JP S5414170A
Authority
JP
Japan
Prior art keywords
electron beam
exposure method
exposing
requiring
1mum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8029777A
Other languages
Japanese (ja)
Inventor
Masaki Ito
Yoshitake Onishi
Kenji Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8029777A priority Critical patent/JPS5414170A/en
Publication of JPS5414170A publication Critical patent/JPS5414170A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To enable to form fine pattern of 1mum or less, by exposing the part not requiring the accuracy comparatively among the patterns in advance and exposing the part requiring the precision after that.
JP8029777A 1977-07-04 1977-07-04 Exposure method of electron beam Pending JPS5414170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8029777A JPS5414170A (en) 1977-07-04 1977-07-04 Exposure method of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8029777A JPS5414170A (en) 1977-07-04 1977-07-04 Exposure method of electron beam

Publications (1)

Publication Number Publication Date
JPS5414170A true JPS5414170A (en) 1979-02-02

Family

ID=13714330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8029777A Pending JPS5414170A (en) 1977-07-04 1977-07-04 Exposure method of electron beam

Country Status (1)

Country Link
JP (1) JPS5414170A (en)

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