JPS54140873A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54140873A JPS54140873A JP4894778A JP4894778A JPS54140873A JP S54140873 A JPS54140873 A JP S54140873A JP 4894778 A JP4894778 A JP 4894778A JP 4894778 A JP4894778 A JP 4894778A JP S54140873 A JPS54140873 A JP S54140873A
- Authority
- JP
- Japan
- Prior art keywords
- film
- pent roof
- opening part
- molecular film
- molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the discontinuance of a film and an decrease in film thickness from occurring at the circumference of an opening part of a semionductor device with a multi-layer film by removing a pent roof produced at the time when the opening part is provided penetrating several superposed films.
CONSTITUTION: After SiO2 film 12 and Si3N4 fim 13 are provided onto the surface of Si substrate 11, an opending is made by photoetching and pent roof 13' is formed. Next, high-molecular film 16 is adhered to the surface and a heat treatment is done to give strength. After pressure 17 is applied to the surface of high-molecular film 16 to break off pent roof 13', high-molecular film 16 is removed by an organic solvent, etc., so that broken pent roof 13' will also be removed.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4894778A JPS54140873A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4894778A JPS54140873A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54140873A true JPS54140873A (en) | 1979-11-01 |
Family
ID=12817461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4894778A Pending JPS54140873A (en) | 1978-04-24 | 1978-04-24 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54140873A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08273415A (en) * | 1996-05-07 | 1996-10-18 | Toshiba Lighting & Technol Corp | Light source with reflector |
-
1978
- 1978-04-24 JP JP4894778A patent/JPS54140873A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08273415A (en) * | 1996-05-07 | 1996-10-18 | Toshiba Lighting & Technol Corp | Light source with reflector |
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