JPS54137274A - Manufacture of beam lead structure semiconductor device - Google Patents
Manufacture of beam lead structure semiconductor deviceInfo
- Publication number
- JPS54137274A JPS54137274A JP4568678A JP4568678A JPS54137274A JP S54137274 A JPS54137274 A JP S54137274A JP 4568678 A JP4568678 A JP 4568678A JP 4568678 A JP4568678 A JP 4568678A JP S54137274 A JPS54137274 A JP S54137274A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- groove
- beam lead
- electrode
- lead structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To secure the stabilized formation of the beam lead featuring good high- frequency characteristics by reducing one side of the device completed with use of the thick semiconductor substrate.
CONSTITUTION: The window is drilled to oxide film 2 on semiconductor substrate 1 to form Schottky junction 3, and anode and cathode lead-out electrode 4 and 5 are provided. Groove 6 is cut on the substrate backs of electrode 4 and 5 with the width equal to the length of 4 and 5 and the depth of 1/2 thickness of substrate 1. After this, groove 7 featuring the depth of more than half of the thickness of the substrate is cut from the surface of the substrate and vertically to groove 6. The uncut part is given the chemical etching, thus the Schottky diode bar of the beam lead structure being separated easily. As a result, the parasitic capacity of electrode 4 and 5 can be reduced via oxide film 2.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4568678A JPS54137274A (en) | 1978-04-17 | 1978-04-17 | Manufacture of beam lead structure semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4568678A JPS54137274A (en) | 1978-04-17 | 1978-04-17 | Manufacture of beam lead structure semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54137274A true JPS54137274A (en) | 1979-10-24 |
| JPS6151420B2 JPS6151420B2 (en) | 1986-11-08 |
Family
ID=12726264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4568678A Granted JPS54137274A (en) | 1978-04-17 | 1978-04-17 | Manufacture of beam lead structure semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54137274A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105845742A (en) * | 2016-05-24 | 2016-08-10 | 中国电子科技集团公司第十三研究所 | Beam lead type terahertz schottky diode |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926454A (en) * | 1972-07-06 | 1974-03-08 | ||
| JPS4987277A (en) * | 1972-12-22 | 1974-08-21 | ||
| JPS5024073A (en) * | 1973-07-05 | 1975-03-14 | ||
| JPS537797A (en) * | 1976-05-15 | 1978-01-24 | Cassella Farbwerke Mainkur Ag | Water soluble or water dispersibility branched copolyester and preparation thereof |
-
1978
- 1978-04-17 JP JP4568678A patent/JPS54137274A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926454A (en) * | 1972-07-06 | 1974-03-08 | ||
| JPS4987277A (en) * | 1972-12-22 | 1974-08-21 | ||
| JPS5024073A (en) * | 1973-07-05 | 1975-03-14 | ||
| JPS537797A (en) * | 1976-05-15 | 1978-01-24 | Cassella Farbwerke Mainkur Ag | Water soluble or water dispersibility branched copolyester and preparation thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105845742A (en) * | 2016-05-24 | 2016-08-10 | 中国电子科技集团公司第十三研究所 | Beam lead type terahertz schottky diode |
| CN105845742B (en) * | 2016-05-24 | 2023-12-19 | 中国电子科技集团公司第十三研究所 | Beam lead terahertz Schottky diode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151420B2 (en) | 1986-11-08 |
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