JPS54134574A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS54134574A
JPS54134574A JP4244678A JP4244678A JPS54134574A JP S54134574 A JPS54134574 A JP S54134574A JP 4244678 A JP4244678 A JP 4244678A JP 4244678 A JP4244678 A JP 4244678A JP S54134574 A JPS54134574 A JP S54134574A
Authority
JP
Japan
Prior art keywords
film
region
mask
drain region
source region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4244678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626663B2 (OSRAM
Inventor
Hiroki Muta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4244678A priority Critical patent/JPS54134574A/ja
Publication of JPS54134574A publication Critical patent/JPS54134574A/ja
Publication of JPS626663B2 publication Critical patent/JPS626663B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP4244678A 1978-04-10 1978-04-10 Production of semiconductor device Granted JPS54134574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4244678A JPS54134574A (en) 1978-04-10 1978-04-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4244678A JPS54134574A (en) 1978-04-10 1978-04-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54134574A true JPS54134574A (en) 1979-10-19
JPS626663B2 JPS626663B2 (OSRAM) 1987-02-12

Family

ID=12636293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4244678A Granted JPS54134574A (en) 1978-04-10 1978-04-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54134574A (OSRAM)

Also Published As

Publication number Publication date
JPS626663B2 (OSRAM) 1987-02-12

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