JPS54134561A - Pattern forming method - Google Patents
Pattern forming methodInfo
- Publication number
- JPS54134561A JPS54134561A JP4245078A JP4245078A JPS54134561A JP S54134561 A JPS54134561 A JP S54134561A JP 4245078 A JP4245078 A JP 4245078A JP 4245078 A JP4245078 A JP 4245078A JP S54134561 A JPS54134561 A JP S54134561A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- photo
- photo mask
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate a needless residual part by laminating a transparent film after applying a photo resistor, and superposing a photo mask and performing exposure in the method by which a pattern is formed on a substrate such as a hybrid integrated circuit by exposure.
CONSTITUTION: Metallic thin film 2 which will be made of a film element is generated on all the surface of substrate 1 by sputtering; and after applying photo resistor 3, transparent film 7 is laminated to form one substrate. Next, this substrate is superposed onto photo mask 4 for which an exposure machine is set previously, and they are caused to adhere to each other closely. After that, exposing ultraviolet rays 5 are irradiated, and photo mask 4 is separated from substrate 1, and film 7 on substrate 1 is exfoliated.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245078A JPS54134561A (en) | 1978-04-10 | 1978-04-10 | Pattern forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245078A JPS54134561A (en) | 1978-04-10 | 1978-04-10 | Pattern forming method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54134561A true JPS54134561A (en) | 1979-10-19 |
Family
ID=12636400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4245078A Pending JPS54134561A (en) | 1978-04-10 | 1978-04-10 | Pattern forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54134561A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10821339B2 (en) | 2014-02-20 | 2020-11-03 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11141633B2 (en) | 2014-02-20 | 2021-10-12 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11235211B2 (en) | 2014-02-20 | 2022-02-01 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11707655B2 (en) | 2018-02-12 | 2023-07-25 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11839800B2 (en) | 2018-02-12 | 2023-12-12 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11938385B1 (en) | 2018-02-12 | 2024-03-26 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
-
1978
- 1978-04-10 JP JP4245078A patent/JPS54134561A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10821339B2 (en) | 2014-02-20 | 2020-11-03 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11141633B2 (en) | 2014-02-20 | 2021-10-12 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11235211B2 (en) | 2014-02-20 | 2022-02-01 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11707655B2 (en) | 2018-02-12 | 2023-07-25 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11833398B2 (en) | 2018-02-12 | 2023-12-05 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11839800B2 (en) | 2018-02-12 | 2023-12-12 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
| US11938385B1 (en) | 2018-02-12 | 2024-03-26 | Parsons Xtreme Golf, LLC | Golf club heads and methods to manufacture golf club heads |
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