JPS54129979A - Electron-beam exposing method - Google Patents
Electron-beam exposing methodInfo
- Publication number
- JPS54129979A JPS54129979A JP3788578A JP3788578A JPS54129979A JP S54129979 A JPS54129979 A JP S54129979A JP 3788578 A JP3788578 A JP 3788578A JP 3788578 A JP3788578 A JP 3788578A JP S54129979 A JPS54129979 A JP S54129979A
- Authority
- JP
- Japan
- Prior art keywords
- information
- work
- signal
- work information
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To shorten a work time by continuing work by work information transferred at the prior stage while work information is transferred from an electronic computer. CONSTITUTION:By the indication of decoder 3, pieces of work information are stored in memories 21 to 2n from electronic computer 1, and by the signal of memory 2n, FF4 shows the transfer-end set state. During this, the irradiation of the prior transfer information ends and FF5 is set by receiving an end signal from exposure controller 6. When the signals of both FFs agree 7, an instruction is sent out 8 to read work information stored in memory unit 2 to memory 9 in parallel and an exposure command is transmitted to controller 6 to supply a signal, which bases upon the information, to screening electrode 9 and deflector 10. Since the electric computer is requested 8 to send information at the same time as reception 8 of coincidence signal 7, the electric computer commands a decoder to read the next work information into memory unit 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3788578A JPS54129979A (en) | 1978-03-31 | 1978-03-31 | Electron-beam exposing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3788578A JPS54129979A (en) | 1978-03-31 | 1978-03-31 | Electron-beam exposing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54129979A true JPS54129979A (en) | 1979-10-08 |
Family
ID=12509988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3788578A Pending JPS54129979A (en) | 1978-03-31 | 1978-03-31 | Electron-beam exposing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54129979A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5577136A (en) * | 1978-12-06 | 1980-06-10 | Fujitsu Ltd | Electron beam exposure control system |
JPS5615043A (en) * | 1979-07-18 | 1981-02-13 | Fujitsu Ltd | Electron beam exposure system |
JPS58147116A (en) * | 1982-02-26 | 1983-09-01 | Toshiba Mach Co Ltd | Image drawing device using electron beam |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
-
1978
- 1978-03-31 JP JP3788578A patent/JPS54129979A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5577136A (en) * | 1978-12-06 | 1980-06-10 | Fujitsu Ltd | Electron beam exposure control system |
JPS5622366B2 (en) * | 1978-12-06 | 1981-05-25 | ||
JPS5615043A (en) * | 1979-07-18 | 1981-02-13 | Fujitsu Ltd | Electron beam exposure system |
JPS58147116A (en) * | 1982-02-26 | 1983-09-01 | Toshiba Mach Co Ltd | Image drawing device using electron beam |
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