JPS54122195A - Production of humidity detecting element - Google Patents

Production of humidity detecting element

Info

Publication number
JPS54122195A
JPS54122195A JP3042578A JP3042578A JPS54122195A JP S54122195 A JPS54122195 A JP S54122195A JP 3042578 A JP3042578 A JP 3042578A JP 3042578 A JP3042578 A JP 3042578A JP S54122195 A JPS54122195 A JP S54122195A
Authority
JP
Japan
Prior art keywords
detecting element
layer
contact part
boiling water
current collecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3042578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130211B2 (enrdf_load_stackoverflow
Inventor
Osakuni Ogino
Atsushi Nishino
Akihiko Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3042578A priority Critical patent/JPS54122195A/ja
Priority to GB7906032A priority patent/GB2017924B/en
Priority to US06/014,382 priority patent/US4276128A/en
Publication of JPS54122195A publication Critical patent/JPS54122195A/ja
Publication of JPS6130211B2 publication Critical patent/JPS6130211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP3042578A 1978-02-20 1978-03-15 Production of humidity detecting element Granted JPS54122195A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3042578A JPS54122195A (en) 1978-03-15 1978-03-15 Production of humidity detecting element
GB7906032A GB2017924B (en) 1978-02-20 1979-02-20 Humidity sensing element of electric capacitance change type and method of producing same
US06/014,382 US4276128A (en) 1978-02-20 1979-02-21 Humidity sensing element of electric capacitance change type and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3042578A JPS54122195A (en) 1978-03-15 1978-03-15 Production of humidity detecting element

Publications (2)

Publication Number Publication Date
JPS54122195A true JPS54122195A (en) 1979-09-21
JPS6130211B2 JPS6130211B2 (enrdf_load_stackoverflow) 1986-07-11

Family

ID=12303589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3042578A Granted JPS54122195A (en) 1978-02-20 1978-03-15 Production of humidity detecting element

Country Status (1)

Country Link
JP (1) JPS54122195A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6130211B2 (enrdf_load_stackoverflow) 1986-07-11

Similar Documents

Publication Publication Date Title
EP0920054A4 (en) SEMICONDUCTOR STORAGE AND THEIR PRODUCTION METHOD
JPS54122195A (en) Production of humidity detecting element
GB2016803A (en) Thin film transistor construction and manufacturing method of the same
JPS57155386A (en) Preventing method for oxidation of copper powder
JPS54122193A (en) Production of humidity detecting element
JPS54122192A (en) Production of humidity detecting element
JPS54122194A (en) Production of humidity detecting element
JPS5270751A (en) Manufacture of electrode of gas discharge panel
JPS55129741A (en) Detector for external atmosphere
JPS5775467A (en) Substrage for solar battery
JPS5618751A (en) Gas detector
JPS54111399A (en) Production of humidity detecting element
JPS5679245A (en) Ion sensor
JPS5339864A (en) Production of semiconductor element electrode
JPS5519855A (en) Thin film condenser and manufacture thereof
JPS556866A (en) Semiconductor device
JPS5493966A (en) Production of 3-5 group compound semiconductor device
JPS5593268A (en) Manufacture of semiconductor device
JPS54147887A (en) Humidity detecting element
JPS54123076A (en) Insulation of surface sensor
JPS56169375A (en) Manufacture of schottky barrier type solar battery
JPS56161669A (en) Manufacture of semiconductor device
JPS577954A (en) Manufacture of hybrid integrated circuit
JPS54126097A (en) Moisture detecting element
JPS54107267A (en) Vessel for semiconductor integrated circuit unit