JPS54122195A - Production of humidity detecting element - Google Patents
Production of humidity detecting elementInfo
- Publication number
- JPS54122195A JPS54122195A JP3042578A JP3042578A JPS54122195A JP S54122195 A JPS54122195 A JP S54122195A JP 3042578 A JP3042578 A JP 3042578A JP 3042578 A JP3042578 A JP 3042578A JP S54122195 A JPS54122195 A JP S54122195A
- Authority
- JP
- Japan
- Prior art keywords
- detecting element
- layer
- contact part
- boiling water
- current collecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- 238000009835 boiling Methods 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 150000004706 metal oxides Chemical class 0.000 abstract 2
- 239000003973 paint Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3042578A JPS54122195A (en) | 1978-03-15 | 1978-03-15 | Production of humidity detecting element |
| GB7906032A GB2017924B (en) | 1978-02-20 | 1979-02-20 | Humidity sensing element of electric capacitance change type and method of producing same |
| US06/014,382 US4276128A (en) | 1978-02-20 | 1979-02-21 | Humidity sensing element of electric capacitance change type and method of producing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3042578A JPS54122195A (en) | 1978-03-15 | 1978-03-15 | Production of humidity detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54122195A true JPS54122195A (en) | 1979-09-21 |
| JPS6130211B2 JPS6130211B2 (enrdf_load_stackoverflow) | 1986-07-11 |
Family
ID=12303589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3042578A Granted JPS54122195A (en) | 1978-02-20 | 1978-03-15 | Production of humidity detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54122195A (enrdf_load_stackoverflow) |
-
1978
- 1978-03-15 JP JP3042578A patent/JPS54122195A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130211B2 (enrdf_load_stackoverflow) | 1986-07-11 |
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