JPS54123076A - Insulation of surface sensor - Google Patents
Insulation of surface sensorInfo
- Publication number
- JPS54123076A JPS54123076A JP2997878A JP2997878A JPS54123076A JP S54123076 A JPS54123076 A JP S54123076A JP 2997878 A JP2997878 A JP 2997878A JP 2997878 A JP2997878 A JP 2997878A JP S54123076 A JPS54123076 A JP S54123076A
- Authority
- JP
- Japan
- Prior art keywords
- film
- sio
- sputter
- widen
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Force In General (AREA)
Abstract
PURPOSE: To facilitate production of a surface sensor and to widen the usable field thereof by forming a sputter film of Al2O3 on the surface of a test piece and by then evaporating the sputter film with a film of SiO2 or SiO.
CONSTITUTION: A steel roller test piece 1, which is used to meter the pressure or temperature between the contact sides of bodies in sliding contact, is formed with a sputter film of Al2O3 as a lower side insulating coating film 2, which is evaporated with a thin metal film 3. This film 3 is made of manganin and is composed of a center thin sensor portion 3a and terminal portions 3b formed at the both sides and connected with lead wires 4. Then, an upper insulating film 5 made of SiO2 is evaporated in a manner to cover the metal film 3 mainly at the center portion 3a. This film covers the recess of the surface, which fails to be covered with the suptter film, thereby to widen the usable field of the surface sensor.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2997878A JPS54123076A (en) | 1978-03-17 | 1978-03-17 | Insulation of surface sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2997878A JPS54123076A (en) | 1978-03-17 | 1978-03-17 | Insulation of surface sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54123076A true JPS54123076A (en) | 1979-09-25 |
Family
ID=12291041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2997878A Pending JPS54123076A (en) | 1978-03-17 | 1978-03-17 | Insulation of surface sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54123076A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5714728A (en) * | 1980-06-30 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Temperature sensor |
-
1978
- 1978-03-17 JP JP2997878A patent/JPS54123076A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5714728A (en) * | 1980-06-30 | 1982-01-26 | Matsushita Electric Ind Co Ltd | Temperature sensor |
JPS6129651B2 (en) * | 1980-06-30 | 1986-07-08 | Matsushita Electric Ind Co Ltd |
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