JPS54123076A - Insulation of surface sensor - Google Patents

Insulation of surface sensor

Info

Publication number
JPS54123076A
JPS54123076A JP2997878A JP2997878A JPS54123076A JP S54123076 A JPS54123076 A JP S54123076A JP 2997878 A JP2997878 A JP 2997878A JP 2997878 A JP2997878 A JP 2997878A JP S54123076 A JPS54123076 A JP S54123076A
Authority
JP
Japan
Prior art keywords
film
sio
sputter
widen
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2997878A
Other languages
Japanese (ja)
Inventor
Naoyuki Tanaka
Toshimitsu Fujiyoshi
Cho Satoyoshi
Masao Okayama
Nobuo Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2997878A priority Critical patent/JPS54123076A/en
Publication of JPS54123076A publication Critical patent/JPS54123076A/en
Pending legal-status Critical Current

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  • Measurement Of Force In General (AREA)

Abstract

PURPOSE: To facilitate production of a surface sensor and to widen the usable field thereof by forming a sputter film of Al2O3 on the surface of a test piece and by then evaporating the sputter film with a film of SiO2 or SiO.
CONSTITUTION: A steel roller test piece 1, which is used to meter the pressure or temperature between the contact sides of bodies in sliding contact, is formed with a sputter film of Al2O3 as a lower side insulating coating film 2, which is evaporated with a thin metal film 3. This film 3 is made of manganin and is composed of a center thin sensor portion 3a and terminal portions 3b formed at the both sides and connected with lead wires 4. Then, an upper insulating film 5 made of SiO2 is evaporated in a manner to cover the metal film 3 mainly at the center portion 3a. This film covers the recess of the surface, which fails to be covered with the suptter film, thereby to widen the usable field of the surface sensor.
COPYRIGHT: (C)1979,JPO&Japio
JP2997878A 1978-03-17 1978-03-17 Insulation of surface sensor Pending JPS54123076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2997878A JPS54123076A (en) 1978-03-17 1978-03-17 Insulation of surface sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2997878A JPS54123076A (en) 1978-03-17 1978-03-17 Insulation of surface sensor

Publications (1)

Publication Number Publication Date
JPS54123076A true JPS54123076A (en) 1979-09-25

Family

ID=12291041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2997878A Pending JPS54123076A (en) 1978-03-17 1978-03-17 Insulation of surface sensor

Country Status (1)

Country Link
JP (1) JPS54123076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5714728A (en) * 1980-06-30 1982-01-26 Matsushita Electric Ind Co Ltd Temperature sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5714728A (en) * 1980-06-30 1982-01-26 Matsushita Electric Ind Co Ltd Temperature sensor
JPS6129651B2 (en) * 1980-06-30 1986-07-08 Matsushita Electric Ind Co Ltd

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