JPS6129651B2 - - Google Patents
Info
- Publication number
- JPS6129651B2 JPS6129651B2 JP55089358A JP8935880A JPS6129651B2 JP S6129651 B2 JPS6129651 B2 JP S6129651B2 JP 55089358 A JP55089358 A JP 55089358A JP 8935880 A JP8935880 A JP 8935880A JP S6129651 B2 JPS6129651 B2 JP S6129651B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- temperature
- sensitive
- plate
- sensitive plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000004043 responsiveness Effects 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- JUWSSMXCCAMYGX-UHFFFAOYSA-N gold platinum Chemical compound [Pt].[Au] JUWSSMXCCAMYGX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- -1 steatite Chemical compound 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
Description
【発明の詳細な説明】
本発明はステンレス板に絶縁被膜、電極膜、感
温抵抗体を直接形成してなる温度センサに関する
もである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a temperature sensor in which an insulating coating, an electrode film, and a temperature-sensitive resistor are directly formed on a stainless steel plate.
従来は温度センサとして、一般に、サーミスタ
や熱電対が多く使用されている。 Conventionally, thermistors and thermocouples have generally been used as temperature sensors.
サーミスタには、焼結型サーミスタと薄膜型サ
ーミスタに大別され、前者はサーミスタ自身の熱
容量が大きく、さらに保護ケースに収納するた
め、熱応答性が悪く、後者は第３図に示す如く、
比較的厚い絶縁性基板イ上に電極ロと感温抵抗体
ハの膜質を形成し、それを金属板ニに接続層ホを
介して接着したり、或は保護ケースに収納したり
するため、熱容量が大きく、しかも熱伝導が悪
く、前者同様に熱応答性が悪いものである。さら
に高温になると金属板ニと絶縁性基板イの熱膨張
係数の差異で剥離する欠点もある。また、熱電対
は、一般に熱起電力が小さく、この起電力を電気
的に検出する場合、大きな増巾が必要で、複雑な
電気回路となり高価なものとなつていた。本発明
は、感温抵抗膜を用い熱応答性の良い、しかも、
センサ素子部を保護し、測温体と良好な接触がで
きる温度センサを得ようとするものである。 Thermistors are broadly classified into sintered type thermistors and thin film type thermistors.The former have a large heat capacity and have poor thermal response because they are housed in a protective case, while the latter have poor thermal response as shown in Figure 3.
In order to form a film of electrode (B) and temperature-sensitive resistor (C) on a relatively thick insulating substrate (A), and to bond it to a metal plate (D) via a connection layer (E), or to house it in a protective case, It has a large heat capacity and poor thermal conductivity, and like the former, it has poor thermal response. Furthermore, when the temperature rises, there is also the drawback that the metal plate 2 and the insulating substrate 2 may peel off due to the difference in thermal expansion coefficient. Further, thermocouples generally have a small thermoelectromotive force, and when detecting this electromotive force electrically, a large amplification is required, resulting in a complicated electric circuit and an expensive one. The present invention uses a temperature-sensitive resistive film and has good thermal responsiveness.
The present invention aims to provide a temperature sensor that protects the sensor element and allows good contact with the temperature measuring body.
本発明の実施例を図面とともに説明する。 Embodiments of the present invention will be described with reference to the drawings.
１は、ステンレス板、コバール合金、鉄−ニツ
ケル合金等からなる金属性の感熱板である。第１
回に示した感熱板１上面のフラツトなものは、ガ
スオーブンの庫内温度やボイラーの熱交換器内の
水温等の零囲気温度用センサとして、また各種表
面温度感知用の接触型センサとして適する。さら
に、特殊な接触型センサとして、接触表面形状
が、凹状又は凸状に湾曲されている物が多い。こ
れらに対応して、第２図に示したように感熱板１
上面を凹状に僅か湾曲させ、接触表面と感熱板１
の外周部で１′で常に安定して接触し、中央部
１″は、接触表面からの輻射で熱を受熱するよう
にし感熱板１と接触表面とが、一定した接触条件
を保てる。 1 is a metallic heat-sensitive plate made of a stainless steel plate, a Kovar alloy, an iron-nickel alloy, or the like. 1st
The flat top surface of the heat-sensitive plate 1 shown in Section 1 is suitable as a sensor for ambient air temperatures such as the temperature inside a gas oven or the water temperature in a heat exchanger of a boiler, and as a contact type sensor for sensing various surface temperatures. . Furthermore, many special contact sensors have a contact surface that is curved in a concave or convex shape. Corresponding to these, as shown in FIG.
The upper surface is slightly curved in a concave shape, and the contact surface and heat sensitive plate 1
The outer circumferential portion 1' always makes stable contact, and the central portion 1'' receives heat by radiation from the contact surface, so that constant contact conditions can be maintained between the heat-sensitive plate 1 and the contact surface.
２は、アルミナ、フオルステライト、ステアタ
イト、ムライト、コージライト等の絶縁性セラミ
ツクスからなる絶縁被膜で感熱板１に形成され
る。絶縁被膜２表面には、タングステン、モリブ
デン、金―白金、等からなる電極膜３３とゲルマ
ニウム、炭化珪素、鉄やマガジン等の酸化物から
なる感温抵抗体膜４を形成してなる。ここで、感
温抵抗体膜４に炭化珪素膜を用いると特に有用性
が大きい。 2 is formed on the heat-sensitive plate 1 with an insulating coating made of insulating ceramics such as alumina, forsterite, steatite, mullite, and cordierite. On the surface of the insulating film 2, an electrode film 33 made of tungsten, molybdenum, gold-platinum, etc., and a temperature-sensitive resistor film 4 made of an oxide of germanium, silicon carbide, iron, magazine, etc. are formed. Here, it is particularly useful to use a silicon carbide film for the temperature sensitive resistor film 4.
すなわち炭化珪炭膜４は、広い使用温度範囲
（常温〜400℃）を有し、また、高耐熱性（500℃
〜700℃）を有しているので、ガスや石油バーナ
を用いる加熱機器の高温用温度センサとして有効
である。 In other words, the silicon carbide membrane 4 has a wide operating temperature range (room temperature to 400°C) and has high heat resistance (up to 500°C).
~700°C), making it effective as a high-temperature sensor for heating equipment that uses gas or oil burners.
５は電極膜３からのセンサード線、６は感熱板
１と複数本の取付足６１で溶接されるセンサ金具
で、下面に２個の切り起し片６２を設けている。
７は、絶縁板でセンサ金具６に切り起し片６２に
よつて固定され、端子８を有している。端子８
は、センサリード線５と引出リード線９をスポツ
ト溶接等で固定する。引出リード線９の他方端
は、感温抵抗体膜４の温度変化による出力を電気
回路（図示せず）に伝える。１０は、保護筒で、
感熱板１に各センサ要素を形成した後、感熱板１
に溶接等で固定される。支持筒１１の張出部１２
と感熱板１間にスプリング１３を介し、間隙１４
を有して、感熱板１を固定した保護筒１０を張出
部１２に挿入し抜け止め１０′でセツトされる。
したがつて、感熱板１は、支持筒１１に対してス
プリング１３で弾性保持されているため、所定範
囲内でスライド可能となり、接触型温度センサと
しては、常に接触面と良好な接触が得られる。
又、感熱板１を単に保護筒１０に溶接するのみで
も、雰囲気温度感知用センサとして十分使用でき
るものである。 5 is a sensored wire from the electrode film 3; 6 is a sensor metal fitting welded to the heat-sensitive plate 1 with a plurality of mounting legs 61; two cut-out pieces 62 are provided on the lower surface;
7 is an insulating plate fixed to the sensor metal fitting 6 by a cut-and-raised piece 62, and has a terminal 8. terminal 8
The sensor lead wire 5 and the lead wire 9 are fixed by spot welding or the like. The other end of the lead wire 9 transmits an output due to a temperature change in the temperature-sensitive resistor film 4 to an electric circuit (not shown). 10 is a protective tube,
After forming each sensor element on the heat-sensitive plate 1, the heat-sensitive plate 1
It is fixed by welding, etc. Projection portion 12 of support tube 11
A spring 13 is placed between the heat sensitive plate 1 and the gap 14.
, the protective tube 10 to which the heat-sensitive plate 1 is fixed is inserted into the overhanging portion 12 and set with a retainer 10'.
Therefore, since the heat-sensitive plate 1 is elastically held against the support tube 11 by the spring 13, it can slide within a predetermined range, and as a contact-type temperature sensor, good contact with the contact surface can always be obtained. .
Furthermore, simply welding the heat-sensitive plate 1 to the protective tube 10 can be used as a sensor for detecting ambient temperature.
以上説明したように、感熱板１に絶縁被膜２を
形成し、その表面に電極膜３と感温抵抗膜４を形
成した事により、センサ自身の熱容量を小さく
し、更に、熱伝導が良いため、熱応答性がすぐれ
た物となり、従来の如く、剥離するという欠点も
解消できる。また、感温抵抗体膜４に炭化珪素膜
を用いると、熱容量が小さく、より熱応答性が向
上され、広温度範囲で高耐熱性の加熱機器用温度
センサが得られる。次に、感熱板１と支持筒１１
間をスプリング１３で弾性保持し、支持筒１１の
上端の外側にスライド可能とした間隙１４を有し
て、保護筒１０と一体形成した感熱板１を配設
し、スプリング１３の上端を感熱板１の上内面に
付勢させているため、感熱板１が首振自在とな
り、測温体（図示しない）と良好な接触が得ら
れ、さらに、測温体と感熱板１とがスライドによ
りずれが生じても、測温体とスプリング１３との
力の荷重面が同じとなり、力のモーメント差が生
じなく良好な接触のまま（隙間があかない）追随
するので確実な温度検出が可能である。また、保
護筒１０によるカバーでセンサ素子部を外部環境
より保護して信頼性も高く、平板状の感熱板１と
なつているため、センサ部の形成も作業性に富み
容易に製作できる。 As explained above, by forming the insulating film 2 on the heat-sensitive plate 1 and forming the electrode film 3 and the temperature-sensitive resistance film 4 on its surface, the heat capacity of the sensor itself is reduced, and furthermore, the heat conduction is good. This results in a product with excellent thermal responsiveness, and eliminates the conventional drawback of peeling. Further, when a silicon carbide film is used for the temperature-sensitive resistor film 4, a temperature sensor for a heating device having a small heat capacity, improved thermal responsiveness, and high heat resistance over a wide temperature range can be obtained. Next, the heat sensitive plate 1 and the support tube 11
A heat-sensitive plate 1 integrally formed with the protective cylinder 10 is provided with a gap 14 that is elastically held by a spring 13 and slidable to the outside of the upper end of the support cylinder 11, and the upper end of the spring 13 is connected to the heat-sensitive plate 1. Since the upper inner surface of the thermosensitive plate 1 is biased, the thermosensitive plate 1 can swing freely, and good contact with the temperature measuring element (not shown) can be obtained. Even if this occurs, the force loading surfaces of the temperature measuring element and the spring 13 are the same, and there is no moment difference in force and the contact remains in good contact (no gap), so reliable temperature detection is possible. . Further, the sensor element part is protected from the external environment by the cover provided by the protection tube 10, and reliability is high.Since the heat-sensitive plate 1 is a flat plate, the sensor part can be easily formed with high workability.
一方、感熱板１の上面を僅か凹状に湾曲させた
事により、凹状や凸状の接触表面形状に対応で
き、感熱板１と支持筒１１間にスプリング１３で
スライド可能に弾性保持することにより、接触表
面との良好な接触ができる接触型温度センサとな
る。さらに、凹面に湾曲しているので温度上昇に
よる熱膨張に対して、保護筒１０の機械的応力が
大きく、感熱板１は、平板状に戻ろうとする。こ
の時、絶縁性セラミツクス２には、圧縮応力がか
かるように働く。これは、一般に、セラミツクス
の圧縮強度は、引張強度の約100倍の強度であ
り、強度の大きい方向となり感熱板１と絶縁基板
２とは確実に接合できる。 On the other hand, by curving the upper surface of the heat-sensitive plate 1 into a slightly concave shape, it can accommodate concave or convex contact surface shapes, and by elastically holding the heat-sensitive plate 1 and the support tube 11 in a slidable manner with a spring 13, This is a contact temperature sensor that can make good contact with the contact surface. Furthermore, since the protective cylinder 10 is curved in a concave manner, the mechanical stress of the protective cylinder 10 is large against thermal expansion due to temperature rise, and the heat-sensitive plate 1 tends to return to its flat shape. At this time, compressive stress is applied to the insulating ceramics 2. Generally, the compressive strength of ceramics is about 100 times higher than the tensile strength, and the heat-sensitive plate 1 and the insulating substrate 2 can be reliably joined in the direction of increasing strength.
さらに感温抵抗体膜４を用いたことで、温度変
化に対して出力が大きいため、複雑な電気回路を
必要とせず、トータルコストも安価となる。 Furthermore, by using the temperature-sensitive resistor film 4, the output is large against temperature changes, so a complicated electric circuit is not required, and the total cost is reduced.
このように、熱応答性にすぐれ、広範囲に使用
でき、測温体と常に良好な接触により正確な温度
を検出できる安価な温度センサを提供することが
できる。 In this way, it is possible to provide an inexpensive temperature sensor that has excellent thermal responsiveness, can be used over a wide range, and can accurately detect temperature by always making good contact with the temperature measuring element.
第１図は、本発明の一実施例における温度セン
サの縦面図、第２図は、他の実施例の要部断面
図、第３図は、従来例の要部断面図を示す。
１……感熱板、２……絶縁被膜、３……電極
膜、４……感温抵抗体膜、１０……保護筒、１１
……支持筒、１３……スプリング。
FIG. 1 is a vertical view of a temperature sensor according to an embodiment of the present invention, FIG. 2 is a sectional view of a main part of another embodiment, and FIG. 3 is a sectional view of a main part of a conventional example. DESCRIPTION OF SYMBOLS 1... Heat-sensitive plate, 2... Insulating coating, 3... Electrode film, 4... Temperature-sensitive resistor film, 10... Protective tube, 11
...Support tube, 13...Spring.
Claims (1)
と、前記感熱板の下面略中央に形成した絶縁被膜
と、この絶縁被膜表面に形成した電極膜と感温抵
抗膜と、前記感熱板の外周で接合される円筒状の
保護筒と、この保護筒にスライド自在に挿入され
る張出部を上端に有したパイプ状の支持筒と、前
記感熱板と支持筒間に設けられたスプリングとを
有し、前記支持筒の張出部の下面と保護筒の下端
とで抜け止めをした温度センサ。 ２ 感熱板の上面を僅か凹状に湾曲させたことを
特徴とする特許請求の範囲第１項記載の温度セン
サ。 ３ 感温抵抗体にSiC膜を用いたことを特徴とす
る特許請求の範囲第１項記載の温度センサ。[Scope of Claims] 1. A heat-sensitive plate having a flat plate shape and made of a stainless steel plate or the like, an insulating coating formed approximately at the center of the lower surface of the heat-sensitive plate, an electrode film and a temperature-sensitive resistance film formed on the surface of the insulating coating, A cylindrical protection tube joined at the outer periphery of the heat-sensitive plate; a pipe-shaped support tube having an overhang at the upper end that is slidably inserted into the protection tube; and a pipe-shaped support tube provided between the heat-sensitive plate and the support tube. The temperature sensor has a spring that is fixed to the support tube, and is prevented from coming off by the lower surface of the protruding portion of the support tube and the lower end of the protection tube. 2. The temperature sensor according to claim 1, wherein the upper surface of the heat-sensitive plate is slightly curved in a concave shape. 3. The temperature sensor according to claim 1, characterized in that a SiC film is used for the temperature-sensitive resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8935880A JPS5714728A (en) | 1980-06-30 | 1980-06-30 | Temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8935880A JPS5714728A (en) | 1980-06-30 | 1980-06-30 | Temperature sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5714728A JPS5714728A (en) | 1982-01-26 |
| JPS6129651B2 true JPS6129651B2 (en) | 1986-07-08 |
Family
ID=13968480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8935880A Granted JPS5714728A (en) | 1980-06-30 | 1980-06-30 | Temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5714728A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0432146U (en) * | 1990-07-12 | 1992-03-16 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59119177A (en) * | 1982-12-27 | 1984-07-10 | 日本鋼管株式会社 | Hot spray repairing device for furnace |
| JPH0658264B2 (en) * | 1984-02-24 | 1994-08-03 | 松下電器産業株式会社 | Temperature sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123076A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Insulation of surface sensor |
| JPS5575202A (en) * | 1978-11-30 | 1980-06-06 | Matsushita Electric Ind Co Ltd | Temperature detector |
-
1980
- 1980-06-30 JP JP8935880A patent/JPS5714728A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123076A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Insulation of surface sensor |
| JPS5575202A (en) * | 1978-11-30 | 1980-06-06 | Matsushita Electric Ind Co Ltd | Temperature detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0432146U (en) * | 1990-07-12 | 1992-03-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5714728A (en) | 1982-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7106167B2 (en) | Stable high temperature sensor system with tungsten on AlN | |
| JP4940938B2 (en) | Thermal mass flow meter | |
| JP5138404B2 (en) | Gas sensor chip and gas sensor having the same | |
| US7214909B2 (en) | Temperature sensor | |
| JPS63275958A (en) | Heat transfer measuring device | |
| US4424507A (en) | Thin film thermistor | |
| JPS5937773B2 (en) | temperature detection device | |
| JPS6129651B2 (en) | ||
| JP2006105651A (en) | Thermopile element and infrared sensor using it | |
| JPH01145537A (en) | Thermocouple for measuring temperature | |
| JPH08146026A (en) | Thermistor flow velocity sensor and flow rate sensor for liquid | |
| JPS6110189Y2 (en) | ||
| JPH0384425A (en) | Thermosensitive flow sensor | |
| JPH06242048A (en) | Thermal conduction type absolute humidity sensor | |
| EP0327252A2 (en) | RTD assembly | |
| SU1303866A1 (en) | Thermoelectric pressure transducer | |
| CN218628663U (en) | Thermopile infrared sensor and thermal shock resistant non-contact temperature measurement gun | |
| JP2557508Y2 (en) | Temperature sensor used for heating control | |
| JPS62231148A (en) | Thermal analysis instrument | |
| JP3864856B2 (en) | Electric water heater | |
| JPS6122261Y2 (en) | ||
| JPS6150361B2 (en) | ||
| JPS6025842Y2 (en) | temperature sensor | |
| JPH0126014B2 (en) | ||
| JP2002367048A (en) | Fire sensor |