JPS54121071A - Insulator gate type field effect semiconductor device - Google Patents
Insulator gate type field effect semiconductor deviceInfo
- Publication number
- JPS54121071A JPS54121071A JP2895078A JP2895078A JPS54121071A JP S54121071 A JPS54121071 A JP S54121071A JP 2895078 A JP2895078 A JP 2895078A JP 2895078 A JP2895078 A JP 2895078A JP S54121071 A JPS54121071 A JP S54121071A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- film
- substrate
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 230000005669 field effect Effects 0.000 title 1
- 239000012212 insulator Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000012535 impurity Substances 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 108091006146 Channels Proteins 0.000 abstract 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2895078A JPS54121071A (en) | 1978-03-13 | 1978-03-13 | Insulator gate type field effect semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2895078A JPS54121071A (en) | 1978-03-13 | 1978-03-13 | Insulator gate type field effect semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54121071A true JPS54121071A (en) | 1979-09-19 |
JPS6410952B2 JPS6410952B2 (enrdf_load_stackoverflow) | 1989-02-22 |
Family
ID=12262678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2895078A Granted JPS54121071A (en) | 1978-03-13 | 1978-03-13 | Insulator gate type field effect semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54121071A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047812A (en) * | 1989-02-27 | 1991-09-10 | Motorola, Inc. | Insulated gate field effect device |
US5449937A (en) * | 1993-03-19 | 1995-09-12 | Sharp Kabushiki Kaisha | Field effect transistor with short channel and manufacturing method therefor |
US5760441A (en) * | 1995-05-16 | 1998-06-02 | Nippon Steel Semiconductor Corporation | Metal oxide semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508484A (enrdf_load_stackoverflow) * | 1973-05-21 | 1975-01-28 |
-
1978
- 1978-03-13 JP JP2895078A patent/JPS54121071A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508484A (enrdf_load_stackoverflow) * | 1973-05-21 | 1975-01-28 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047812A (en) * | 1989-02-27 | 1991-09-10 | Motorola, Inc. | Insulated gate field effect device |
US5449937A (en) * | 1993-03-19 | 1995-09-12 | Sharp Kabushiki Kaisha | Field effect transistor with short channel and manufacturing method therefor |
US5760441A (en) * | 1995-05-16 | 1998-06-02 | Nippon Steel Semiconductor Corporation | Metal oxide semiconductor device |
US6153911A (en) * | 1995-05-16 | 2000-11-28 | Nippon Steel Semiconductor Corp. | Metal oxide semiconductor device and method manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6410952B2 (enrdf_load_stackoverflow) | 1989-02-22 |
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