JPS54117684A - Selective etching method of semiconductor - Google Patents
Selective etching method of semiconductorInfo
- Publication number
- JPS54117684A JPS54117684A JP2511278A JP2511278A JPS54117684A JP S54117684 A JPS54117684 A JP S54117684A JP 2511278 A JP2511278 A JP 2511278A JP 2511278 A JP2511278 A JP 2511278A JP S54117684 A JPS54117684 A JP S54117684A
- Authority
- JP
- Japan
- Prior art keywords
- selective etching
- semiconductor
- etching method
- etching mask
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2511278A JPS54117684A (en) | 1978-03-06 | 1978-03-06 | Selective etching method of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2511278A JPS54117684A (en) | 1978-03-06 | 1978-03-06 | Selective etching method of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54117684A true JPS54117684A (en) | 1979-09-12 |
Family
ID=12156833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2511278A Pending JPS54117684A (en) | 1978-03-06 | 1978-03-06 | Selective etching method of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54117684A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6472563A (en) * | 1987-09-11 | 1989-03-17 | Fuji Electric Co Ltd | Manufacture of reverse conducting type gto thyristor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503576A (ja) * | 1973-05-14 | 1975-01-14 |
-
1978
- 1978-03-06 JP JP2511278A patent/JPS54117684A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503576A (ja) * | 1973-05-14 | 1975-01-14 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6472563A (en) * | 1987-09-11 | 1989-03-17 | Fuji Electric Co Ltd | Manufacture of reverse conducting type gto thyristor |
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