JPS503576A - - Google Patents
Info
- Publication number
- JPS503576A JPS503576A JP5342173A JP5342173A JPS503576A JP S503576 A JPS503576 A JP S503576A JP 5342173 A JP5342173 A JP 5342173A JP 5342173 A JP5342173 A JP 5342173A JP S503576 A JPS503576 A JP S503576A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Dicing (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342173A JPS5317391B2 (ja) | 1973-05-14 | 1973-05-14 | |
| US05/467,563 US3972113A (en) | 1973-05-14 | 1974-05-06 | Process of producing semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342173A JPS5317391B2 (ja) | 1973-05-14 | 1973-05-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS503576A true JPS503576A (ja) | 1975-01-14 |
| JPS5317391B2 JPS5317391B2 (ja) | 1978-06-08 |
Family
ID=12942364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5342173A Expired JPS5317391B2 (ja) | 1973-05-14 | 1973-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5317391B2 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51113474A (en) * | 1975-03-29 | 1976-10-06 | Toshiba Corp | Semiconductor element and its manufacturing system |
| JPS5224474A (en) * | 1975-08-20 | 1977-02-23 | Hitachi Ltd | Semiconductor device process |
| JPS52131463A (en) * | 1976-04-27 | 1977-11-04 | Mitsubishi Electric Corp | Semiconductor device |
| JPS531937A (en) * | 1976-06-28 | 1978-01-10 | Kurose Yoshihito | Messer shield device |
| JPS5363725A (en) * | 1976-11-19 | 1978-06-07 | Omoto Constr Co Ltd | Device for shielding tunnel excavation |
| JPS54117684A (en) * | 1978-03-06 | 1979-09-12 | Fuji Electric Co Ltd | Selective etching method of semiconductor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61199877A (ja) * | 1985-02-28 | 1986-09-04 | 株式会社 タカラ | 合体ロボツト玩具 |
-
1973
- 1973-05-14 JP JP5342173A patent/JPS5317391B2/ja not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51113474A (en) * | 1975-03-29 | 1976-10-06 | Toshiba Corp | Semiconductor element and its manufacturing system |
| JPS584466B2 (ja) * | 1975-03-29 | 1983-01-26 | 株式会社東芝 | 半導体素子の製造方法 |
| JPS5224474A (en) * | 1975-08-20 | 1977-02-23 | Hitachi Ltd | Semiconductor device process |
| JPS52131463A (en) * | 1976-04-27 | 1977-11-04 | Mitsubishi Electric Corp | Semiconductor device |
| JPS584814B2 (ja) * | 1976-04-27 | 1983-01-27 | 三菱電機株式会社 | 半導体装置 |
| JPS531937A (en) * | 1976-06-28 | 1978-01-10 | Kurose Yoshihito | Messer shield device |
| JPS5363725A (en) * | 1976-11-19 | 1978-06-07 | Omoto Constr Co Ltd | Device for shielding tunnel excavation |
| JPS54117684A (en) * | 1978-03-06 | 1979-09-12 | Fuji Electric Co Ltd | Selective etching method of semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5317391B2 (ja) | 1978-06-08 |