JPS503576A - - Google Patents

Info

Publication number
JPS503576A
JPS503576A JP5342173A JP5342173A JPS503576A JP S503576 A JPS503576 A JP S503576A JP 5342173 A JP5342173 A JP 5342173A JP 5342173 A JP5342173 A JP 5342173A JP S503576 A JPS503576 A JP S503576A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5342173A
Other versions
JPS5317391B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5342173A priority Critical patent/JPS5317391B2/ja
Priority to US05/467,563 priority patent/US3972113A/en
Publication of JPS503576A publication Critical patent/JPS503576A/ja
Publication of JPS5317391B2 publication Critical patent/JPS5317391B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Formation Of Insulating Films (AREA)
  • Dicing (AREA)
  • Bipolar Transistors (AREA)
JP5342173A 1973-05-14 1973-05-14 Expired JPS5317391B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5342173A JPS5317391B2 (ja) 1973-05-14 1973-05-14
US05/467,563 US3972113A (en) 1973-05-14 1974-05-06 Process of producing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5342173A JPS5317391B2 (ja) 1973-05-14 1973-05-14

Publications (2)

Publication Number Publication Date
JPS503576A true JPS503576A (ja) 1975-01-14
JPS5317391B2 JPS5317391B2 (ja) 1978-06-08

Family

ID=12942364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5342173A Expired JPS5317391B2 (ja) 1973-05-14 1973-05-14

Country Status (1)

Country Link
JP (1) JPS5317391B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113474A (en) * 1975-03-29 1976-10-06 Toshiba Corp Semiconductor element and its manufacturing system
JPS5224474A (en) * 1975-08-20 1977-02-23 Hitachi Ltd Semiconductor device process
JPS52131463A (en) * 1976-04-27 1977-11-04 Mitsubishi Electric Corp Semiconductor device
JPS531937A (en) * 1976-06-28 1978-01-10 Kurose Yoshihito Messer shield device
JPS5363725A (en) * 1976-11-19 1978-06-07 Omoto Constr Co Ltd Device for shielding tunnel excavation
JPS54117684A (en) * 1978-03-06 1979-09-12 Fuji Electric Co Ltd Selective etching method of semiconductor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113474A (en) * 1975-03-29 1976-10-06 Toshiba Corp Semiconductor element and its manufacturing system
JPS5224474A (en) * 1975-08-20 1977-02-23 Hitachi Ltd Semiconductor device process
JPS52131463A (en) * 1976-04-27 1977-11-04 Mitsubishi Electric Corp Semiconductor device
JPS531937A (en) * 1976-06-28 1978-01-10 Kurose Yoshihito Messer shield device
JPS5363725A (en) * 1976-11-19 1978-06-07 Omoto Constr Co Ltd Device for shielding tunnel excavation
JPS54117684A (en) * 1978-03-06 1979-09-12 Fuji Electric Co Ltd Selective etching method of semiconductor

Also Published As

Publication number Publication date
JPS5317391B2 (ja) 1978-06-08

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