JPS54114170A - Astigmatic correction device for scanning electronic microscope or the like - Google Patents

Astigmatic correction device for scanning electronic microscope or the like

Info

Publication number
JPS54114170A
JPS54114170A JP2174278A JP2174278A JPS54114170A JP S54114170 A JPS54114170 A JP S54114170A JP 2174278 A JP2174278 A JP 2174278A JP 2174278 A JP2174278 A JP 2174278A JP S54114170 A JPS54114170 A JP S54114170A
Authority
JP
Japan
Prior art keywords
scanning
unit
signal
circuit
driving circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2174278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134222B2 (enrdf_load_html_response
Inventor
Takao Namae
Teruo Someya
Kazuo Ishikawa
Shigeru Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2174278A priority Critical patent/JPS54114170A/ja
Publication of JPS54114170A publication Critical patent/JPS54114170A/ja
Publication of JPS6134222B2 publication Critical patent/JPS6134222B2/ja
Granted legal-status Critical Current

Links

JP2174278A 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like Granted JPS54114170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2174278A JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2174278A JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Publications (2)

Publication Number Publication Date
JPS54114170A true JPS54114170A (en) 1979-09-06
JPS6134222B2 JPS6134222B2 (enrdf_load_html_response) 1986-08-06

Family

ID=12063519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2174278A Granted JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Country Status (1)

Country Link
JP (1) JPS54114170A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01134845A (ja) * 1987-11-20 1989-05-26 Hitachi Ltd 自動非点収差補正装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110360A (ja) * 1987-10-25 1989-04-27 Shin:Kk 眼部の冷却・保温装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01134845A (ja) * 1987-11-20 1989-05-26 Hitachi Ltd 自動非点収差補正装置

Also Published As

Publication number Publication date
JPS6134222B2 (enrdf_load_html_response) 1986-08-06

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