JPS6134222B2 - - Google Patents

Info

Publication number
JPS6134222B2
JPS6134222B2 JP53021742A JP2174278A JPS6134222B2 JP S6134222 B2 JPS6134222 B2 JP S6134222B2 JP 53021742 A JP53021742 A JP 53021742A JP 2174278 A JP2174278 A JP 2174278A JP S6134222 B2 JPS6134222 B2 JP S6134222B2
Authority
JP
Japan
Prior art keywords
electron beam
astigmatism
scanning
sample
astigmatism correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53021742A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54114170A (en
Inventor
Takao Namae
Teruo Someya
Kazuo Ishikawa
Shigeru Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP2174278A priority Critical patent/JPS54114170A/ja
Publication of JPS54114170A publication Critical patent/JPS54114170A/ja
Publication of JPS6134222B2 publication Critical patent/JPS6134222B2/ja
Granted legal-status Critical Current

Links

JP2174278A 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like Granted JPS54114170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2174278A JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2174278A JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Publications (2)

Publication Number Publication Date
JPS54114170A JPS54114170A (en) 1979-09-06
JPS6134222B2 true JPS6134222B2 (enrdf_load_html_response) 1986-08-06

Family

ID=12063519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2174278A Granted JPS54114170A (en) 1978-02-27 1978-02-27 Astigmatic correction device for scanning electronic microscope or the like

Country Status (1)

Country Link
JP (1) JPS54114170A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110360A (ja) * 1987-10-25 1989-04-27 Shin:Kk 眼部の冷却・保温装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01134845A (ja) * 1987-11-20 1989-05-26 Hitachi Ltd 自動非点収差補正装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01110360A (ja) * 1987-10-25 1989-04-27 Shin:Kk 眼部の冷却・保温装置

Also Published As

Publication number Publication date
JPS54114170A (en) 1979-09-06

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