JPS54111399A - Production of humidity detecting element - Google Patents

Production of humidity detecting element

Info

Publication number
JPS54111399A
JPS54111399A JP1895078A JP1895078A JPS54111399A JP S54111399 A JPS54111399 A JP S54111399A JP 1895078 A JP1895078 A JP 1895078A JP 1895078 A JP1895078 A JP 1895078A JP S54111399 A JPS54111399 A JP S54111399A
Authority
JP
Japan
Prior art keywords
oxide film
layer
change
film
relative humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1895078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151263B2 (cs
Inventor
Akihiko Yoshida
Atsushi Nishino
Osakuni Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1895078A priority Critical patent/JPS54111399A/ja
Priority to GB7906032A priority patent/GB2017924B/en
Priority to US06/014,382 priority patent/US4276128A/en
Publication of JPS54111399A publication Critical patent/JPS54111399A/ja
Publication of JPS6151263B2 publication Critical patent/JPS6151263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP1895078A 1978-02-20 1978-02-20 Production of humidity detecting element Granted JPS54111399A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1895078A JPS54111399A (en) 1978-02-20 1978-02-20 Production of humidity detecting element
GB7906032A GB2017924B (en) 1978-02-20 1979-02-20 Humidity sensing element of electric capacitance change type and method of producing same
US06/014,382 US4276128A (en) 1978-02-20 1979-02-21 Humidity sensing element of electric capacitance change type and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1895078A JPS54111399A (en) 1978-02-20 1978-02-20 Production of humidity detecting element

Publications (2)

Publication Number Publication Date
JPS54111399A true JPS54111399A (en) 1979-08-31
JPS6151263B2 JPS6151263B2 (cs) 1986-11-07

Family

ID=11985917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1895078A Granted JPS54111399A (en) 1978-02-20 1978-02-20 Production of humidity detecting element

Country Status (1)

Country Link
JP (1) JPS54111399A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014511487A (ja) * 2011-02-24 2014-05-15 シーケイアイコム テクノロジーズ リミテッド 湿気センサー付きの着用可能な物品

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62178266U (cs) * 1986-05-06 1987-11-12
JPS62179867U (cs) * 1986-05-07 1987-11-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014511487A (ja) * 2011-02-24 2014-05-15 シーケイアイコム テクノロジーズ リミテッド 湿気センサー付きの着用可能な物品

Also Published As

Publication number Publication date
JPS6151263B2 (cs) 1986-11-07

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