JPS5796248A - Detecting method for gas using superparticulate gas sensor - Google Patents

Detecting method for gas using superparticulate gas sensor

Info

Publication number
JPS5796248A
JPS5796248A JP17238680A JP17238680A JPS5796248A JP S5796248 A JPS5796248 A JP S5796248A JP 17238680 A JP17238680 A JP 17238680A JP 17238680 A JP17238680 A JP 17238680A JP S5796248 A JPS5796248 A JP S5796248A
Authority
JP
Japan
Prior art keywords
gas
superparticulate
detected
resistance value
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17238680A
Other languages
Japanese (ja)
Other versions
JPS6158775B2 (en
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17238680A priority Critical patent/JPS5796248A/en
Publication of JPS5796248A publication Critical patent/JPS5796248A/en
Publication of JPS6158775B2 publication Critical patent/JPS6158775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To eliminate ununiformity of the sensitivity of the super-particulate gas sensor by detecting gas from the ratio of the resistance value in the absence of the gas to be detected to the resistance value in the presence of the gas to be detected. CONSTITUTION:The superparticulate gas sensor is constituted by providing an SiO2 film 7 on the surface of a p type silicon substrate 1, by providing electrodes 4', 4'' and 4''' on the surface of the film and by forming a superparticulate gas sensing film 5 on the top of the electrodes. As the thickness of this gas sensing film 5 is increased, an electric resistance value RO in the air where no gas to be detected is present is reduced. On the other hand, when the ratio of the above value to an electric resistance value RG in the presence of the gas to be detected is taken, the value thereof is fixed irrespective of inequality of RO.
JP17238680A 1980-12-05 1980-12-05 Detecting method for gas using superparticulate gas sensor Granted JPS5796248A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17238680A JPS5796248A (en) 1980-12-05 1980-12-05 Detecting method for gas using superparticulate gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17238680A JPS5796248A (en) 1980-12-05 1980-12-05 Detecting method for gas using superparticulate gas sensor

Publications (2)

Publication Number Publication Date
JPS5796248A true JPS5796248A (en) 1982-06-15
JPS6158775B2 JPS6158775B2 (en) 1986-12-13

Family

ID=15940952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17238680A Granted JPS5796248A (en) 1980-12-05 1980-12-05 Detecting method for gas using superparticulate gas sensor

Country Status (1)

Country Link
JP (1) JPS5796248A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112264U (en) * 1984-12-27 1986-07-16
JPS61112261U (en) * 1984-12-27 1986-07-16
JPS61114352U (en) * 1984-12-28 1986-07-19
JPS61114353U (en) * 1984-12-28 1986-07-19
DE3623893A1 (en) * 1985-07-19 1987-01-29 Junkosha Co Ltd DETECTOR FOR DETECTING LEAKS OF A CORROSIVE LIQUID

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112264U (en) * 1984-12-27 1986-07-16
JPS61112261U (en) * 1984-12-27 1986-07-16
JPH041492Y2 (en) * 1984-12-27 1992-01-20
JPH041493Y2 (en) * 1984-12-27 1992-01-20
JPS61114352U (en) * 1984-12-28 1986-07-19
JPS61114353U (en) * 1984-12-28 1986-07-19
JPH0411166Y2 (en) * 1984-12-28 1992-03-19
JPH0411165Y2 (en) * 1984-12-28 1992-03-19
DE3623893A1 (en) * 1985-07-19 1987-01-29 Junkosha Co Ltd DETECTOR FOR DETECTING LEAKS OF A CORROSIVE LIQUID
DE3623893C2 (en) * 1985-07-19 1992-04-16 Junkosha Co Ltd DETECTOR FOR DETECTING LIQUID LEAKAGE

Also Published As

Publication number Publication date
JPS6158775B2 (en) 1986-12-13

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