JPS5527925A - Method of manufacturing senser - Google Patents

Method of manufacturing senser

Info

Publication number
JPS5527925A
JPS5527925A JP10062078A JP10062078A JPS5527925A JP S5527925 A JPS5527925 A JP S5527925A JP 10062078 A JP10062078 A JP 10062078A JP 10062078 A JP10062078 A JP 10062078A JP S5527925 A JPS5527925 A JP S5527925A
Authority
JP
Japan
Prior art keywords
senser
sno
oxide
measured
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10062078A
Other languages
Japanese (ja)
Other versions
JPS6030893B2 (en
Inventor
Kuni Ogawa
Atsushi Abe
Masahiro Nishikawa
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10062078A priority Critical patent/JPS6030893B2/en
Publication of JPS5527925A publication Critical patent/JPS5527925A/en
Publication of JPS6030893B2 publication Critical patent/JPS6030893B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To make possible detection of density of gas and vapor contained in a material at a high sensitivity by changing mere measuring temperatures used if ultrafine grain film of Sn oxide as a sensitive material is sticked onto a supporting substrate in a special atmosphere.
CONSTITUTION: Sn, SnO or SnO2 are evaporized in the atmosphere of O2 gas pressure of 0.1W1 Tor and on the substrate 3 on which electrodes 9, 10 are previously mounted by vacuum evaporation, etc. is formed ultrafine grain film 11 of Sn oxide. This senser can selectively detect isobutane if measured at 200°C or vapor if measured at room temperature.
COPYRIGHT: (C)1980,JPO&Japio
JP10062078A 1978-08-17 1978-08-17 How to manufacture the sensor Expired JPS6030893B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10062078A JPS6030893B2 (en) 1978-08-17 1978-08-17 How to manufacture the sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062078A JPS6030893B2 (en) 1978-08-17 1978-08-17 How to manufacture the sensor

Publications (2)

Publication Number Publication Date
JPS5527925A true JPS5527925A (en) 1980-02-28
JPS6030893B2 JPS6030893B2 (en) 1985-07-19

Family

ID=14278875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062078A Expired JPS6030893B2 (en) 1978-08-17 1978-08-17 How to manufacture the sensor

Country Status (1)

Country Link
JP (1) JPS6030893B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5722549A (en) * 1980-07-16 1982-02-05 Matsushita Electric Ind Co Ltd Gas sensor and manufacture thereof
JPS5796250A (en) * 1980-12-05 1982-06-15 Matsushita Electric Ind Co Ltd Manufacture of superparticulate sensor
DE102017110568A1 (en) 2016-05-17 2017-11-23 Denso Corporation CONTROL UNIT FOR A ROTATING MACHINE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5722549A (en) * 1980-07-16 1982-02-05 Matsushita Electric Ind Co Ltd Gas sensor and manufacture thereof
JPS5796250A (en) * 1980-12-05 1982-06-15 Matsushita Electric Ind Co Ltd Manufacture of superparticulate sensor
JPS6312536B2 (en) * 1980-12-05 1988-03-19 Matsushita Electric Ind Co Ltd
DE102017110568A1 (en) 2016-05-17 2017-11-23 Denso Corporation CONTROL UNIT FOR A ROTATING MACHINE

Also Published As

Publication number Publication date
JPS6030893B2 (en) 1985-07-19

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