JPS5527925A - Method of manufacturing senser - Google Patents
Method of manufacturing senserInfo
- Publication number
- JPS5527925A JPS5527925A JP10062078A JP10062078A JPS5527925A JP S5527925 A JPS5527925 A JP S5527925A JP 10062078 A JP10062078 A JP 10062078A JP 10062078 A JP10062078 A JP 10062078A JP S5527925 A JPS5527925 A JP S5527925A
- Authority
- JP
- Japan
- Prior art keywords
- senser
- sno
- oxide
- measured
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To make possible detection of density of gas and vapor contained in a material at a high sensitivity by changing mere measuring temperatures used if ultrafine grain film of Sn oxide as a sensitive material is sticked onto a supporting substrate in a special atmosphere.
CONSTITUTION: Sn, SnO or SnO2 are evaporized in the atmosphere of O2 gas pressure of 0.1W1 Tor and on the substrate 3 on which electrodes 9, 10 are previously mounted by vacuum evaporation, etc. is formed ultrafine grain film 11 of Sn oxide. This senser can selectively detect isobutane if measured at 200°C or vapor if measured at room temperature.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062078A JPS6030893B2 (en) | 1978-08-17 | 1978-08-17 | How to manufacture the sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062078A JPS6030893B2 (en) | 1978-08-17 | 1978-08-17 | How to manufacture the sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5527925A true JPS5527925A (en) | 1980-02-28 |
JPS6030893B2 JPS6030893B2 (en) | 1985-07-19 |
Family
ID=14278875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10062078A Expired JPS6030893B2 (en) | 1978-08-17 | 1978-08-17 | How to manufacture the sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6030893B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5722549A (en) * | 1980-07-16 | 1982-02-05 | Matsushita Electric Ind Co Ltd | Gas sensor and manufacture thereof |
JPS5796250A (en) * | 1980-12-05 | 1982-06-15 | Matsushita Electric Ind Co Ltd | Manufacture of superparticulate sensor |
DE102017110568A1 (en) | 2016-05-17 | 2017-11-23 | Denso Corporation | CONTROL UNIT FOR A ROTATING MACHINE |
-
1978
- 1978-08-17 JP JP10062078A patent/JPS6030893B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5722549A (en) * | 1980-07-16 | 1982-02-05 | Matsushita Electric Ind Co Ltd | Gas sensor and manufacture thereof |
JPS5796250A (en) * | 1980-12-05 | 1982-06-15 | Matsushita Electric Ind Co Ltd | Manufacture of superparticulate sensor |
JPS6312536B2 (en) * | 1980-12-05 | 1988-03-19 | Matsushita Electric Ind Co Ltd | |
DE102017110568A1 (en) | 2016-05-17 | 2017-11-23 | Denso Corporation | CONTROL UNIT FOR A ROTATING MACHINE |
Also Published As
Publication number | Publication date |
---|---|
JPS6030893B2 (en) | 1985-07-19 |
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