JPS5529758A - Detector employing extremely-fine corpuscule resist film - Google Patents
Detector employing extremely-fine corpuscule resist filmInfo
- Publication number
- JPS5529758A JPS5529758A JP10302678A JP10302678A JPS5529758A JP S5529758 A JPS5529758 A JP S5529758A JP 10302678 A JP10302678 A JP 10302678A JP 10302678 A JP10302678 A JP 10302678A JP S5529758 A JPS5529758 A JP S5529758A
- Authority
- JP
- Japan
- Prior art keywords
- corpuscule
- fine
- resist film
- extremely
- detector employing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To detect components of gas, steam etc., with high sensitivity by employing an extremely-fine corpuscule resis film.
CONSTITUTION: Senditive resistance 12 employing an extremely-fine corpuscule resist film is heated by heater 17 placed to the circumference. Sensitive element 12 having a heating method is installed in an atmosphere where measurement is carried out. The resistance value of sensitive element 12 varies with the density of the atmospheric gas to be measured, but is read out as the variation of the dividing ratio of the voltage in this constitution. The extremely-fine corpuscule resist film consists of metal such as Pd or oxide corpuscule of SnO2, ZnO or NiO.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10302678A JPS5529758A (en) | 1978-08-23 | 1978-08-23 | Detector employing extremely-fine corpuscule resist film |
US06/066,332 US4313338A (en) | 1978-08-18 | 1979-08-14 | Gas sensing device |
CA333,788A CA1123052A (en) | 1978-08-18 | 1979-08-15 | Gas sensing device and method of manufacturing same |
GB7928825A GB2029583B (en) | 1978-08-18 | 1979-08-17 | Gas sensing device and method of manufacturing the same |
DE2953771A DE2953771C1 (en) | 1978-08-18 | 1979-08-17 | Gas detector |
DE2933394A DE2933394C2 (en) | 1978-08-18 | 1979-08-17 | Gas detector and process for its manufacture |
US06/275,254 US4362765A (en) | 1978-08-18 | 1981-06-19 | Method of manufacturing a gas sensing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10302678A JPS5529758A (en) | 1978-08-23 | 1978-08-23 | Detector employing extremely-fine corpuscule resist film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5529758A true JPS5529758A (en) | 1980-03-03 |
JPS6222096B2 JPS6222096B2 (en) | 1987-05-15 |
Family
ID=14343126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10302678A Granted JPS5529758A (en) | 1978-08-18 | 1978-08-23 | Detector employing extremely-fine corpuscule resist film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5529758A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
JPS62222153A (en) * | 1984-09-29 | 1987-09-30 | Hiroshi Komiyama | Gas sensitive composite body containing metal and dielectric and manufacture thereof |
JPH0343399U (en) * | 1989-08-29 | 1991-04-23 | ||
JP2010002366A (en) * | 2008-06-23 | 2010-01-07 | Riken Keiki Co Ltd | Semiconductor type gas detector |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52131791A (en) * | 1976-04-28 | 1977-11-04 | Murata Manufacturing Co | Gas detecting element |
JPS5378890A (en) * | 1976-12-21 | 1978-07-12 | Nitto Electric Ind Co | Manufacturing method and apparatus for gas sensor element |
-
1978
- 1978-08-23 JP JP10302678A patent/JPS5529758A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52131791A (en) * | 1976-04-28 | 1977-11-04 | Murata Manufacturing Co | Gas detecting element |
JPS5378890A (en) * | 1976-12-21 | 1978-07-12 | Nitto Electric Ind Co | Manufacturing method and apparatus for gas sensor element |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58105049A (en) * | 1981-12-17 | 1983-06-22 | Matsushita Electric Ind Co Ltd | Detector of no2 gas and detecting method therefor |
JPS5990040A (en) * | 1982-11-15 | 1984-05-24 | Matsushita Electric Ind Co Ltd | Detector for gaseous carbon monoxide |
JPS62222153A (en) * | 1984-09-29 | 1987-09-30 | Hiroshi Komiyama | Gas sensitive composite body containing metal and dielectric and manufacture thereof |
JPH0479540B2 (en) * | 1984-09-29 | 1992-12-16 | Hiroshi Komyama | |
JPH0343399U (en) * | 1989-08-29 | 1991-04-23 | ||
JPH0515999Y2 (en) * | 1989-08-29 | 1993-04-27 | ||
JP2010002366A (en) * | 2008-06-23 | 2010-01-07 | Riken Keiki Co Ltd | Semiconductor type gas detector |
Also Published As
Publication number | Publication date |
---|---|
JPS6222096B2 (en) | 1987-05-15 |
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