JPS5796249A - Detecting method for humidity by using superparticulate sensor - Google Patents

Detecting method for humidity by using superparticulate sensor

Info

Publication number
JPS5796249A
JPS5796249A JP55172387A JP17238780A JPS5796249A JP S5796249 A JPS5796249 A JP S5796249A JP 55172387 A JP55172387 A JP 55172387A JP 17238780 A JP17238780 A JP 17238780A JP S5796249 A JPS5796249 A JP S5796249A
Authority
JP
Japan
Prior art keywords
temperature
degrees
superparticulate
gas sensing
several tens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55172387A
Other languages
Japanese (ja)
Other versions
JPS6152942B2 (en
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55172387A priority Critical patent/JPS5796249A/en
Publication of JPS5796249A publication Critical patent/JPS5796249A/en
Publication of JPS6152942B2 publication Critical patent/JPS6152942B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE:To enable highly sensitive detection in a short time by heating the superparticulate gas sensing film up to the temperature of several hundreds of degrees, by lowering later the temperature down to several tens of degrees and by detecting the humidity under the condition that the temperature is kept at several tens of degrees. CONSTITUTION:After the superparticulate gas sensing film is heated to the temperature of several hundreds of degrees, the operating temperature is lowered, and when it falls down to several tens of degrees at a level RO' before the electric resistance RO of the superparticulate gas sensing film starts to fall, the film is made to operate with the temperature kept at a fixed level to conduct the measurement of humidity under the condition. The optimum operating temperature is within the range of 40 deg.C to 90 deg.C, and the amount of adsorption of water to the surface of an element increases, and the response velocity decreases at the temperature lower than 40 deg.C, while the adsorption of water to the surface of the element turns hard to occur and sensitivity is lost when the temperature rises higher than 90 deg.C.
JP55172387A 1980-12-05 1980-12-05 Detecting method for humidity by using superparticulate sensor Granted JPS5796249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55172387A JPS5796249A (en) 1980-12-05 1980-12-05 Detecting method for humidity by using superparticulate sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55172387A JPS5796249A (en) 1980-12-05 1980-12-05 Detecting method for humidity by using superparticulate sensor

Publications (2)

Publication Number Publication Date
JPS5796249A true JPS5796249A (en) 1982-06-15
JPS6152942B2 JPS6152942B2 (en) 1986-11-15

Family

ID=15940973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55172387A Granted JPS5796249A (en) 1980-12-05 1980-12-05 Detecting method for humidity by using superparticulate sensor

Country Status (1)

Country Link
JP (1) JPS5796249A (en)

Also Published As

Publication number Publication date
JPS6152942B2 (en) 1986-11-15

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