JPS5796249A - Detecting method for humidity by using superparticulate sensor - Google Patents
Detecting method for humidity by using superparticulate sensorInfo
- Publication number
- JPS5796249A JPS5796249A JP55172387A JP17238780A JPS5796249A JP S5796249 A JPS5796249 A JP S5796249A JP 55172387 A JP55172387 A JP 55172387A JP 17238780 A JP17238780 A JP 17238780A JP S5796249 A JPS5796249 A JP S5796249A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- degrees
- superparticulate
- gas sensing
- several tens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE:To enable highly sensitive detection in a short time by heating the superparticulate gas sensing film up to the temperature of several hundreds of degrees, by lowering later the temperature down to several tens of degrees and by detecting the humidity under the condition that the temperature is kept at several tens of degrees. CONSTITUTION:After the superparticulate gas sensing film is heated to the temperature of several hundreds of degrees, the operating temperature is lowered, and when it falls down to several tens of degrees at a level RO' before the electric resistance RO of the superparticulate gas sensing film starts to fall, the film is made to operate with the temperature kept at a fixed level to conduct the measurement of humidity under the condition. The optimum operating temperature is within the range of 40 deg.C to 90 deg.C, and the amount of adsorption of water to the surface of an element increases, and the response velocity decreases at the temperature lower than 40 deg.C, while the adsorption of water to the surface of the element turns hard to occur and sensitivity is lost when the temperature rises higher than 90 deg.C.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55172387A JPS5796249A (en) | 1980-12-05 | 1980-12-05 | Detecting method for humidity by using superparticulate sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55172387A JPS5796249A (en) | 1980-12-05 | 1980-12-05 | Detecting method for humidity by using superparticulate sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5796249A true JPS5796249A (en) | 1982-06-15 |
JPS6152942B2 JPS6152942B2 (en) | 1986-11-15 |
Family
ID=15940973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55172387A Granted JPS5796249A (en) | 1980-12-05 | 1980-12-05 | Detecting method for humidity by using superparticulate sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5796249A (en) |
-
1980
- 1980-12-05 JP JP55172387A patent/JPS5796249A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6152942B2 (en) | 1986-11-15 |
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