JPS5722549A - Gas sensor and manufacture thereof - Google Patents

Gas sensor and manufacture thereof

Info

Publication number
JPS5722549A
JPS5722549A JP9792880A JP9792880A JPS5722549A JP S5722549 A JPS5722549 A JP S5722549A JP 9792880 A JP9792880 A JP 9792880A JP 9792880 A JP9792880 A JP 9792880A JP S5722549 A JPS5722549 A JP S5722549A
Authority
JP
Japan
Prior art keywords
boat
substrate
ultrafine
particle film
ultrafine particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9792880A
Other languages
Japanese (ja)
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9792880A priority Critical patent/JPS5722549A/en
Publication of JPS5722549A publication Critical patent/JPS5722549A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To increase the conductivity of an ultrafine particle film and adhesive strength with the substrate by providing a layer of ultrafine particles on a substrate so that the diameters of the particles gradually and continuously increase and forming the ultrafine particle film. CONSTITUTION:An evaporating material 14 such as Sn or its oxide is contained in a boat 13, and electrode material 16 is contained in a boat 15. The boats 13 and 15 are arranged in an vacuum evaporator 11, wherein an insulating substrate 1 is set on a specimen holder 12. A vacuum pump which is connected to an exhausting part 17 is actuated and a device 11 is evacuated. When a power supply 18 is turned ON, the boat 13 is heated, and the material 14 is evaporated. At the same time, oxygen gas is introduced into the device 11 from an introducing port 19 until a specified pressure is attained. On the substrate 1, the ultrafine particle film 4 is formed wherein the diameter of the particles gradually increase. Then a heater 20 is conducted, and the ultrafine film 4 is heat-treated. After the device 11 has been evacuated again, the boat 15 is conducted by a power source 22 and heated, the material 16 is evaporated, and the electrodes 2 and 3 are formed.
JP9792880A 1980-07-16 1980-07-16 Gas sensor and manufacture thereof Pending JPS5722549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9792880A JPS5722549A (en) 1980-07-16 1980-07-16 Gas sensor and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9792880A JPS5722549A (en) 1980-07-16 1980-07-16 Gas sensor and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS5722549A true JPS5722549A (en) 1982-02-05

Family

ID=14205330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9792880A Pending JPS5722549A (en) 1980-07-16 1980-07-16 Gas sensor and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5722549A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146759U (en) * 1983-03-22 1984-10-01 新コスモス電機株式会社 gas detection element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527925A (en) * 1978-08-17 1980-02-28 Matsushita Electric Ind Co Ltd Method of manufacturing senser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527925A (en) * 1978-08-17 1980-02-28 Matsushita Electric Ind Co Ltd Method of manufacturing senser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146759U (en) * 1983-03-22 1984-10-01 新コスモス電機株式会社 gas detection element
JPH0219725Y2 (en) * 1983-03-22 1990-05-30

Similar Documents

Publication Publication Date Title
JPS5778519A (en) Production of electrochromic display element
JPS5722549A (en) Gas sensor and manufacture thereof
JPS5578235A (en) Sensor and its manufacture
JPS5722547A (en) Gas sensing element
JPS5710629A (en) Plasma treatment of hollow body
JPS5788028A (en) Formation of electrically conductive transparent film of indium oxide
JPS5527953A (en) Method of fabricating senser
JPS5614408A (en) Manufacture of solid electrolyte
JPS5772235A (en) Transparent electrode and production thereof
JPS55129740A (en) Detector for external atmosphere
JPS5763443A (en) Manufacture of sensor for superfine powder
JPS55159147A (en) Production of sensor
JPS57123968A (en) Formation of zinc oxide film by plasma vapor phase method
JPS5825090B2 (en) Toumaid Udensei Himakuoyuusuru Koubunshiseikeibutsunoseizohouhou
JPS55158549A (en) Production of sensor
JPS5765324A (en) Method and apparatus for preparing ultrafine particle membrane
JPS6030893B2 (en) How to manufacture the sensor
JPS5785972A (en) Thin film former
JPS5779620A (en) Plasma etching process
JPS5213485A (en) Coated adsorbent and process for producing thereof
SU910837A1 (en) Apparatus for thermal evaporation of materials in vacuum
JPS6436762A (en) Manufacture of transparent conductive film
JPS55159150A (en) Production of sensor
JPS5724904A (en) Polarizing plate
JPS5669374A (en) Dry etching method