JPS5722547A - Gas sensing element - Google Patents

Gas sensing element

Info

Publication number
JPS5722547A
JPS5722547A JP9708380A JP9708380A JPS5722547A JP S5722547 A JPS5722547 A JP S5722547A JP 9708380 A JP9708380 A JP 9708380A JP 9708380 A JP9708380 A JP 9708380A JP S5722547 A JPS5722547 A JP S5722547A
Authority
JP
Japan
Prior art keywords
boat
oxide
substrate
evaporated
forming mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9708380A
Other languages
Japanese (ja)
Other versions
JPS6151260B2 (en
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9708380A priority Critical patent/JPS5722547A/en
Publication of JPS5722547A publication Critical patent/JPS5722547A/en
Publication of JPS6151260B2 publication Critical patent/JPS6151260B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To decrease the operating temperature by constituting the contact part between a sensing film comprising ultrafine particles of oxide and taking out electrodes by Pd, and enhancing sensitivity to methane or bydrogen. CONSTITUTION:An evaporating material such as Pd is contained in a boat 13. Oxide 16 such as Sn is contained in a boat 15. The boats 13 and 15 are set in a vacuum evaporator 11, wherein an insulating substrate 1 is attached to a specimen 12. An electrode forming mask is set on said substrate 1, and a vacuum pump which is connected to an exhaust port 17 is actuated, and a device 11 is evaporated. The boat 13 is conducted from a power source 18, the material 14 is evaporated, and the taking out electrodes 2 and 3 comprising a Pd evaporated film are formed on the substrate 1. Then the electrode forming mask is chaged to an ultrafine particle forming mask, and oxygen gas is introduced from an introducing port 19. Thereafter the boat 15 is conducted from the power source 20 and heated to evaporate the oxide 16. The sensing film 4 comprising the ultrafilne particles of oxide is formed on the substrate 1.
JP9708380A 1980-07-15 1980-07-15 Gas sensing element Granted JPS5722547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9708380A JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9708380A JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Publications (2)

Publication Number Publication Date
JPS5722547A true JPS5722547A (en) 1982-02-05
JPS6151260B2 JPS6151260B2 (en) 1986-11-07

Family

ID=14182738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9708380A Granted JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Country Status (1)

Country Link
JP (1) JPS5722547A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02193051A (en) * 1989-01-20 1990-07-30 Stanley Electric Co Ltd Gas sensor using organic semiconductor
JP2006003153A (en) * 2004-06-16 2006-01-05 Saginomiya Seisakusho Inc Hydrogen gas sensing element, hydrogen gas sensor and hydrogen gas sensing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02193051A (en) * 1989-01-20 1990-07-30 Stanley Electric Co Ltd Gas sensor using organic semiconductor
JP2006003153A (en) * 2004-06-16 2006-01-05 Saginomiya Seisakusho Inc Hydrogen gas sensing element, hydrogen gas sensor and hydrogen gas sensing method

Also Published As

Publication number Publication date
JPS6151260B2 (en) 1986-11-07

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