JPS54107876A - Method and apparatus for reduction - Google Patents

Method and apparatus for reduction

Info

Publication number
JPS54107876A
JPS54107876A JP1489878A JP1489878A JPS54107876A JP S54107876 A JPS54107876 A JP S54107876A JP 1489878 A JP1489878 A JP 1489878A JP 1489878 A JP1489878 A JP 1489878A JP S54107876 A JPS54107876 A JP S54107876A
Authority
JP
Japan
Prior art keywords
plasma
gas
microwave
temperature
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1489878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6116502B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Muranaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1489878A priority Critical patent/JPS54107876A/ja
Publication of JPS54107876A publication Critical patent/JPS54107876A/ja
Publication of JPS6116502B2 publication Critical patent/JPS6116502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1489878A 1978-02-14 1978-02-14 Method and apparatus for reduction Granted JPS54107876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1489878A JPS54107876A (en) 1978-02-14 1978-02-14 Method and apparatus for reduction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1489878A JPS54107876A (en) 1978-02-14 1978-02-14 Method and apparatus for reduction

Publications (2)

Publication Number Publication Date
JPS54107876A true JPS54107876A (en) 1979-08-24
JPS6116502B2 JPS6116502B2 (enrdf_load_stackoverflow) 1986-04-30

Family

ID=11873802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1489878A Granted JPS54107876A (en) 1978-02-14 1978-02-14 Method and apparatus for reduction

Country Status (1)

Country Link
JP (1) JPS54107876A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149642A (en) * 1979-05-08 1980-11-21 Rikagaku Kenkyusho Reduction of oxide
JPS5762537A (en) * 1980-10-02 1982-04-15 Semiconductor Energy Lab Co Ltd Forming method for film
JPS57138159A (en) * 1981-02-20 1982-08-26 Fujitsu Ltd Formation of thin film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55149642A (en) * 1979-05-08 1980-11-21 Rikagaku Kenkyusho Reduction of oxide
JPS5762537A (en) * 1980-10-02 1982-04-15 Semiconductor Energy Lab Co Ltd Forming method for film
JPS57138159A (en) * 1981-02-20 1982-08-26 Fujitsu Ltd Formation of thin film

Also Published As

Publication number Publication date
JPS6116502B2 (enrdf_load_stackoverflow) 1986-04-30

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