JPS54101258A - Wafer holder - Google Patents

Wafer holder

Info

Publication number
JPS54101258A
JPS54101258A JP723478A JP723478A JPS54101258A JP S54101258 A JPS54101258 A JP S54101258A JP 723478 A JP723478 A JP 723478A JP 723478 A JP723478 A JP 723478A JP S54101258 A JPS54101258 A JP S54101258A
Authority
JP
Japan
Prior art keywords
wafer
holder
hold
wafer holder
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP723478A
Other languages
English (en)
Inventor
Kiyoshi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP723478A priority Critical patent/JPS54101258A/ja
Publication of JPS54101258A publication Critical patent/JPS54101258A/ja
Pending legal-status Critical Current

Links

JP723478A 1978-01-27 1978-01-27 Wafer holder Pending JPS54101258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP723478A JPS54101258A (en) 1978-01-27 1978-01-27 Wafer holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP723478A JPS54101258A (en) 1978-01-27 1978-01-27 Wafer holder

Publications (1)

Publication Number Publication Date
JPS54101258A true JPS54101258A (en) 1979-08-09

Family

ID=11660294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP723478A Pending JPS54101258A (en) 1978-01-27 1978-01-27 Wafer holder

Country Status (1)

Country Link
JP (1) JPS54101258A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5074736A (en) * 1988-12-20 1991-12-24 Texas Instruments Incorporated Semiconductor wafer carrier design
US5184723A (en) * 1991-05-14 1993-02-09 Fluoroware, Inc. Single wafer robotic package
US5556477A (en) * 1994-06-09 1996-09-17 Leybold Aktiengesellschaft Transport device for substrates to be coated in a vacuum coating system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5074736A (en) * 1988-12-20 1991-12-24 Texas Instruments Incorporated Semiconductor wafer carrier design
US5184723A (en) * 1991-05-14 1993-02-09 Fluoroware, Inc. Single wafer robotic package
US5556477A (en) * 1994-06-09 1996-09-17 Leybold Aktiengesellschaft Transport device for substrates to be coated in a vacuum coating system

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