JPS5231455A - Vacuum chuck device - Google Patents

Vacuum chuck device

Info

Publication number
JPS5231455A
JPS5231455A JP10694775A JP10694775A JPS5231455A JP S5231455 A JPS5231455 A JP S5231455A JP 10694775 A JP10694775 A JP 10694775A JP 10694775 A JP10694775 A JP 10694775A JP S5231455 A JPS5231455 A JP S5231455A
Authority
JP
Japan
Prior art keywords
vacuum chuck
chuck device
size
holding force
always obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10694775A
Other languages
Japanese (ja)
Inventor
Hirotake Hirai
Atsushi Matsuzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10694775A priority Critical patent/JPS5231455A/en
Publication of JPS5231455A publication Critical patent/JPS5231455A/en
Pending legal-status Critical Current

Links

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  • Manipulator (AREA)

Abstract

PURPOSE: To provide a vacuum chuck characterized in that a strong holding force is always obtained automatically even if a size and a form of an object change.
COPYRIGHT: (C)1977,JPO&Japio
JP10694775A 1975-09-05 1975-09-05 Vacuum chuck device Pending JPS5231455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10694775A JPS5231455A (en) 1975-09-05 1975-09-05 Vacuum chuck device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10694775A JPS5231455A (en) 1975-09-05 1975-09-05 Vacuum chuck device

Publications (1)

Publication Number Publication Date
JPS5231455A true JPS5231455A (en) 1977-03-09

Family

ID=14446556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10694775A Pending JPS5231455A (en) 1975-09-05 1975-09-05 Vacuum chuck device

Country Status (1)

Country Link
JP (1) JPS5231455A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5867832U (en) * 1981-10-29 1983-05-09 株式会社アマダ Board material adsorption confirmation device
JPS59153809U (en) * 1983-04-01 1984-10-16 株式会社　古川製作所 Differential pressure operated valve
JPS62196982U (en) * 1986-06-04 1987-12-15
JPH0347790U (en) * 1989-09-11 1991-05-07
US5183670A (en) * 1991-04-30 1993-02-02 United Technologies Corporation Bi-functional transfer foot
US6467824B2 (en) * 2001-03-13 2002-10-22 Data I/O Corporation Floating seal pick and place system and unit therefor
CN102079463A (en) * 2009-11-26 2011-06-01 江南大学 Novel combined yarn collecting spindle
JP2021074824A (en) * 2019-11-11 2021-05-20 澁谷工業株式会社 Adsorption state detection device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5867832U (en) * 1981-10-29 1983-05-09 株式会社アマダ Board material adsorption confirmation device
JPS59153809U (en) * 1983-04-01 1984-10-16 株式会社　古川製作所 Differential pressure operated valve
JPS6335937Y2 (en) * 1983-04-01 1988-09-22
JPS62196982U (en) * 1986-06-04 1987-12-15
JPH0347790U (en) * 1989-09-11 1991-05-07
US5183670A (en) * 1991-04-30 1993-02-02 United Technologies Corporation Bi-functional transfer foot
US6467824B2 (en) * 2001-03-13 2002-10-22 Data I/O Corporation Floating seal pick and place system and unit therefor
CN102079463A (en) * 2009-11-26 2011-06-01 江南大学 Novel combined yarn collecting spindle
JP2021074824A (en) * 2019-11-11 2021-05-20 澁谷工業株式会社 Adsorption state detection device

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