JPS5397383A - Manufacture of wiring for electronic parts - Google Patents

Manufacture of wiring for electronic parts

Info

Publication number
JPS5397383A
JPS5397383A JP1168077A JP1168077A JPS5397383A JP S5397383 A JPS5397383 A JP S5397383A JP 1168077 A JP1168077 A JP 1168077A JP 1168077 A JP1168077 A JP 1168077A JP S5397383 A JPS5397383 A JP S5397383A
Authority
JP
Japan
Prior art keywords
wiring
manufacture
electronic parts
perticularly
featuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1168077A
Other languages
Japanese (ja)
Inventor
Akio Anzai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1168077A priority Critical patent/JPS5397383A/en
Publication of JPS5397383A publication Critical patent/JPS5397383A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To coat the new Al film through the lift-off method only to the wiring such as the power source wiring featuring a perticularly large current capacity among Al wirings which are provided on the upper layer. Thus, both the thickness and the width are increased, enhancing the wiring density as well as reducing the chip size.
JP1168077A 1977-02-07 1977-02-07 Manufacture of wiring for electronic parts Pending JPS5397383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1168077A JPS5397383A (en) 1977-02-07 1977-02-07 Manufacture of wiring for electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1168077A JPS5397383A (en) 1977-02-07 1977-02-07 Manufacture of wiring for electronic parts

Publications (1)

Publication Number Publication Date
JPS5397383A true JPS5397383A (en) 1978-08-25

Family

ID=11784701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1168077A Pending JPS5397383A (en) 1977-02-07 1977-02-07 Manufacture of wiring for electronic parts

Country Status (1)

Country Link
JP (1) JPS5397383A (en)

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