JPS5393789A - Monitor strcutre of photo semiconductor - Google Patents

Monitor strcutre of photo semiconductor

Info

Publication number
JPS5393789A
JPS5393789A JP844677A JP844677A JPS5393789A JP S5393789 A JPS5393789 A JP S5393789A JP 844677 A JP844677 A JP 844677A JP 844677 A JP844677 A JP 844677A JP S5393789 A JPS5393789 A JP S5393789A
Authority
JP
Japan
Prior art keywords
strcutre
monitor
photo semiconductor
retionalize
photoetching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP844677A
Other languages
Japanese (ja)
Inventor
Yukio Kurata
Morichika Yano
Saburo Yamamoto
Kaneki Matsui
Akira Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP844677A priority Critical patent/JPS5393789A/en
Publication of JPS5393789A publication Critical patent/JPS5393789A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)

Abstract

PURPOSE:To eliminate the need for alignment of both elements and retionalize adjustment lines requiring labor by simultaneously forming a pair of light emitting element and monitoring photo detector on the same semiconductor substrate through photoetching.
JP844677A 1977-01-27 1977-01-27 Monitor strcutre of photo semiconductor Pending JPS5393789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP844677A JPS5393789A (en) 1977-01-27 1977-01-27 Monitor strcutre of photo semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP844677A JPS5393789A (en) 1977-01-27 1977-01-27 Monitor strcutre of photo semiconductor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4090978A Division JPS53149779A (en) 1978-04-06 1978-04-06 Preventive structure from transition vibration of semiconductor laser element

Publications (1)

Publication Number Publication Date
JPS5393789A true JPS5393789A (en) 1978-08-17

Family

ID=11693340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP844677A Pending JPS5393789A (en) 1977-01-27 1977-01-27 Monitor strcutre of photo semiconductor

Country Status (1)

Country Link
JP (1) JPS5393789A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108574A (en) * 1975-03-19 1976-09-25 New Nippon Electric Co Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108574A (en) * 1975-03-19 1976-09-25 New Nippon Electric Co Handotaisochino seizohoho

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