JPS5392673A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS5392673A JPS5392673A JP713377A JP713377A JPS5392673A JP S5392673 A JPS5392673 A JP S5392673A JP 713377 A JP713377 A JP 713377A JP 713377 A JP713377 A JP 713377A JP S5392673 A JPS5392673 A JP S5392673A
- Authority
- JP
- Japan
- Prior art keywords
- resistance layer
- forming
- low
- semiconductor
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To shorten the forming time as well as to realize a large capacity and high output when a thick low-resistance layer is formed to secure an ohmic contact to teh semiconductor element substrate, by forming first the low-resistance layer through diffusion and then forming the same conduction type low-resistance layer through vapor growing method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP713377A JPS5392673A (en) | 1977-01-24 | 1977-01-24 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP713377A JPS5392673A (en) | 1977-01-24 | 1977-01-24 | Manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5392673A true JPS5392673A (en) | 1978-08-14 |
Family
ID=11657568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP713377A Pending JPS5392673A (en) | 1977-01-24 | 1977-01-24 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5392673A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5696034A (en) * | 1994-08-31 | 1997-12-09 | Shin-Etsu Handotai Co., Ltd. | Method for producing semiconductor substrate |
-
1977
- 1977-01-24 JP JP713377A patent/JPS5392673A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5696034A (en) * | 1994-08-31 | 1997-12-09 | Shin-Etsu Handotai Co., Ltd. | Method for producing semiconductor substrate |
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