JPS5392673A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS5392673A
JPS5392673A JP713377A JP713377A JPS5392673A JP S5392673 A JPS5392673 A JP S5392673A JP 713377 A JP713377 A JP 713377A JP 713377 A JP713377 A JP 713377A JP S5392673 A JPS5392673 A JP S5392673A
Authority
JP
Japan
Prior art keywords
resistance layer
forming
low
semiconductor
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP713377A
Other languages
Japanese (ja)
Inventor
Tsutomu Nakagawa
Akira Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP713377A priority Critical patent/JPS5392673A/en
Publication of JPS5392673A publication Critical patent/JPS5392673A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To shorten the forming time as well as to realize a large capacity and high output when a thick low-resistance layer is formed to secure an ohmic contact to teh semiconductor element substrate, by forming first the low-resistance layer through diffusion and then forming the same conduction type low-resistance layer through vapor growing method.
COPYRIGHT: (C)1978,JPO&Japio
JP713377A 1977-01-24 1977-01-24 Manufacture of semiconductor Pending JPS5392673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP713377A JPS5392673A (en) 1977-01-24 1977-01-24 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP713377A JPS5392673A (en) 1977-01-24 1977-01-24 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS5392673A true JPS5392673A (en) 1978-08-14

Family

ID=11657568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP713377A Pending JPS5392673A (en) 1977-01-24 1977-01-24 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5392673A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696034A (en) * 1994-08-31 1997-12-09 Shin-Etsu Handotai Co., Ltd. Method for producing semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696034A (en) * 1994-08-31 1997-12-09 Shin-Etsu Handotai Co., Ltd. Method for producing semiconductor substrate

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