JPS5385168A - Photoetching method - Google Patents

Photoetching method

Info

Publication number
JPS5385168A
JPS5385168A JP4477A JP4477A JPS5385168A JP S5385168 A JPS5385168 A JP S5385168A JP 4477 A JP4477 A JP 4477A JP 4477 A JP4477 A JP 4477A JP S5385168 A JPS5385168 A JP S5385168A
Authority
JP
Japan
Prior art keywords
photoetching method
substrate
low temperature
temperature below
photo mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4477A
Other languages
English (en)
Inventor
Shigeo Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4477A priority Critical patent/JPS5385168A/ja
Publication of JPS5385168A publication Critical patent/JPS5385168A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP4477A 1977-01-05 1977-01-05 Photoetching method Pending JPS5385168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4477A JPS5385168A (en) 1977-01-05 1977-01-05 Photoetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4477A JPS5385168A (en) 1977-01-05 1977-01-05 Photoetching method

Publications (1)

Publication Number Publication Date
JPS5385168A true JPS5385168A (en) 1978-07-27

Family

ID=11463280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4477A Pending JPS5385168A (en) 1977-01-05 1977-01-05 Photoetching method

Country Status (1)

Country Link
JP (1) JPS5385168A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512645A (en) * 1978-07-14 1980-01-29 Hitachi Ltd Auxiliary relay circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512645A (en) * 1978-07-14 1980-01-29 Hitachi Ltd Auxiliary relay circuit

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