JPS5429987A - Forming method of selective vapor-deposition film - Google Patents
Forming method of selective vapor-deposition filmInfo
- Publication number
- JPS5429987A JPS5429987A JP9508477A JP9508477A JPS5429987A JP S5429987 A JPS5429987 A JP S5429987A JP 9508477 A JP9508477 A JP 9508477A JP 9508477 A JP9508477 A JP 9508477A JP S5429987 A JPS5429987 A JP S5429987A
- Authority
- JP
- Japan
- Prior art keywords
- deposition film
- forming method
- selective vapor
- vapor
- selective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form selectively a vapor-deposition film by side-etching a spacer between a photo resist and substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9508477A JPS5429987A (en) | 1977-08-10 | 1977-08-10 | Forming method of selective vapor-deposition film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9508477A JPS5429987A (en) | 1977-08-10 | 1977-08-10 | Forming method of selective vapor-deposition film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5429987A true JPS5429987A (en) | 1979-03-06 |
Family
ID=14128065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9508477A Pending JPS5429987A (en) | 1977-08-10 | 1977-08-10 | Forming method of selective vapor-deposition film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251627A (en) * | 1984-05-28 | 1985-12-12 | Rohm Co Ltd | Manufacture of semiconductor device |
-
1977
- 1977-08-10 JP JP9508477A patent/JPS5429987A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251627A (en) * | 1984-05-28 | 1985-12-12 | Rohm Co Ltd | Manufacture of semiconductor device |
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