JPS5375774A - Exposure unit - Google Patents

Exposure unit

Info

Publication number
JPS5375774A
JPS5375774A JP15161576A JP15161576A JPS5375774A JP S5375774 A JPS5375774 A JP S5375774A JP 15161576 A JP15161576 A JP 15161576A JP 15161576 A JP15161576 A JP 15161576A JP S5375774 A JPS5375774 A JP S5375774A
Authority
JP
Japan
Prior art keywords
exposure unit
positioning
mask
enable
even under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15161576A
Other languages
Japanese (ja)
Other versions
JPS563663B2 (en
Inventor
Yoshiro Fushida
Takanao Shiratori
Masao Hiyane
Tadao Saito
Sunao Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP15161576A priority Critical patent/JPS5375774A/en
Publication of JPS5375774A publication Critical patent/JPS5375774A/en
Publication of JPS563663B2 publication Critical patent/JPS563663B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To enable the positioning between the mask and the object even under exposing work by means of intermittent flashing, in the exposure unit providing the positioning section using the oscillating slit method.
COPYRIGHT: (C)1978,JPO&Japio
JP15161576A 1976-12-16 1976-12-16 Exposure unit Granted JPS5375774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15161576A JPS5375774A (en) 1976-12-16 1976-12-16 Exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15161576A JPS5375774A (en) 1976-12-16 1976-12-16 Exposure unit

Publications (2)

Publication Number Publication Date
JPS5375774A true JPS5375774A (en) 1978-07-05
JPS563663B2 JPS563663B2 (en) 1981-01-26

Family

ID=15522399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15161576A Granted JPS5375774A (en) 1976-12-16 1976-12-16 Exposure unit

Country Status (1)

Country Link
JP (1) JPS5375774A (en)

Also Published As

Publication number Publication date
JPS563663B2 (en) 1981-01-26

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