JPS53148391A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53148391A
JPS53148391A JP6371877A JP6371877A JPS53148391A JP S53148391 A JPS53148391 A JP S53148391A JP 6371877 A JP6371877 A JP 6371877A JP 6371877 A JP6371877 A JP 6371877A JP S53148391 A JPS53148391 A JP S53148391A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
opening
area
desired shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6371877A
Other languages
Japanese (ja)
Inventor
Junji Iguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP6371877A priority Critical patent/JPS53148391A/en
Publication of JPS53148391A publication Critical patent/JPS53148391A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To form the opening having the desired shape and area without residual film, by performing development after exposure twice or more.
COPYRIGHT: (C)1978,JPO&Japio
JP6371877A 1977-05-31 1977-05-31 Manufacture for semiconductor device Pending JPS53148391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6371877A JPS53148391A (en) 1977-05-31 1977-05-31 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6371877A JPS53148391A (en) 1977-05-31 1977-05-31 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53148391A true JPS53148391A (en) 1978-12-23

Family

ID=13237442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6371877A Pending JPS53148391A (en) 1977-05-31 1977-05-31 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53148391A (en)

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