JPS53148391A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53148391A JPS53148391A JP6371877A JP6371877A JPS53148391A JP S53148391 A JPS53148391 A JP S53148391A JP 6371877 A JP6371877 A JP 6371877A JP 6371877 A JP6371877 A JP 6371877A JP S53148391 A JPS53148391 A JP S53148391A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- opening
- area
- desired shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To form the opening having the desired shape and area without residual film, by performing development after exposure twice or more.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6371877A JPS53148391A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6371877A JPS53148391A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53148391A true JPS53148391A (en) | 1978-12-23 |
Family
ID=13237442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6371877A Pending JPS53148391A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148391A (en) |
-
1977
- 1977-05-31 JP JP6371877A patent/JPS53148391A/en active Pending
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