JPS5372474A - Manufacture for field effect transistor - Google Patents

Manufacture for field effect transistor

Info

Publication number
JPS5372474A
JPS5372474A JP14805676A JP14805676A JPS5372474A JP S5372474 A JPS5372474 A JP S5372474A JP 14805676 A JP14805676 A JP 14805676A JP 14805676 A JP14805676 A JP 14805676A JP S5372474 A JPS5372474 A JP S5372474A
Authority
JP
Japan
Prior art keywords
manufacture
field effect
effect transistor
etching
combinating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14805676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS579706B2 (enrdf_load_stackoverflow
Inventor
Masumi Fukuda
Katsuhiko Suyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14805676A priority Critical patent/JPS5372474A/ja
Publication of JPS5372474A publication Critical patent/JPS5372474A/ja
Publication of JPS579706B2 publication Critical patent/JPS579706B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP14805676A 1976-12-09 1976-12-09 Manufacture for field effect transistor Granted JPS5372474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14805676A JPS5372474A (en) 1976-12-09 1976-12-09 Manufacture for field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14805676A JPS5372474A (en) 1976-12-09 1976-12-09 Manufacture for field effect transistor

Publications (2)

Publication Number Publication Date
JPS5372474A true JPS5372474A (en) 1978-06-27
JPS579706B2 JPS579706B2 (enrdf_load_stackoverflow) 1982-02-23

Family

ID=15444170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14805676A Granted JPS5372474A (en) 1976-12-09 1976-12-09 Manufacture for field effect transistor

Country Status (1)

Country Link
JP (1) JPS5372474A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166968A (en) * 1979-06-15 1980-12-26 Fujitsu Ltd Schottky barrier type field effect transistor
JPS57106082A (en) * 1980-12-23 1982-07-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of schottky junction type electric field effect transistor
JPH11330096A (ja) * 1998-05-19 1999-11-30 Hitachi Ltd 半導体装置及びその製造方法並びに通信機

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166968A (en) * 1979-06-15 1980-12-26 Fujitsu Ltd Schottky barrier type field effect transistor
JPS57106082A (en) * 1980-12-23 1982-07-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of schottky junction type electric field effect transistor
JPH11330096A (ja) * 1998-05-19 1999-11-30 Hitachi Ltd 半導体装置及びその製造方法並びに通信機

Also Published As

Publication number Publication date
JPS579706B2 (enrdf_load_stackoverflow) 1982-02-23

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