JPS5362478A - Soft x-ray transfer apparatus - Google Patents

Soft x-ray transfer apparatus

Info

Publication number
JPS5362478A
JPS5362478A JP13729176A JP13729176A JPS5362478A JP S5362478 A JPS5362478 A JP S5362478A JP 13729176 A JP13729176 A JP 13729176A JP 13729176 A JP13729176 A JP 13729176A JP S5362478 A JPS5362478 A JP S5362478A
Authority
JP
Japan
Prior art keywords
soft
transfer apparatus
ray transfer
mask
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13729176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5337713B2 (enExample
Inventor
Kayao Takemoto
Toa Hayasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
NTT Inc
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP13729176A priority Critical patent/JPS5362478A/ja
Publication of JPS5362478A publication Critical patent/JPS5362478A/ja
Publication of JPS5337713B2 publication Critical patent/JPS5337713B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP13729176A 1976-11-17 1976-11-17 Soft x-ray transfer apparatus Granted JPS5362478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13729176A JPS5362478A (en) 1976-11-17 1976-11-17 Soft x-ray transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13729176A JPS5362478A (en) 1976-11-17 1976-11-17 Soft x-ray transfer apparatus

Publications (2)

Publication Number Publication Date
JPS5362478A true JPS5362478A (en) 1978-06-03
JPS5337713B2 JPS5337713B2 (enExample) 1978-10-11

Family

ID=15195240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13729176A Granted JPS5362478A (en) 1976-11-17 1976-11-17 Soft x-ray transfer apparatus

Country Status (1)

Country Link
JP (1) JPS5362478A (enExample)

Also Published As

Publication number Publication date
JPS5337713B2 (enExample) 1978-10-11

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