JPS5361978A - Semiconductor wafer inspector - Google Patents
Semiconductor wafer inspectorInfo
- Publication number
- JPS5361978A JPS5361978A JP13767076A JP13767076A JPS5361978A JP S5361978 A JPS5361978 A JP S5361978A JP 13767076 A JP13767076 A JP 13767076A JP 13767076 A JP13767076 A JP 13767076A JP S5361978 A JPS5361978 A JP S5361978A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer inspector
- wafers
- inspector
- pusher
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13767076A JPS5361978A (en) | 1976-11-15 | 1976-11-15 | Semiconductor wafer inspector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13767076A JPS5361978A (en) | 1976-11-15 | 1976-11-15 | Semiconductor wafer inspector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5361978A true JPS5361978A (en) | 1978-06-02 |
Family
ID=15204061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13767076A Pending JPS5361978A (en) | 1976-11-15 | 1976-11-15 | Semiconductor wafer inspector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5361978A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01239864A (ja) * | 1988-03-18 | 1989-09-25 | Shinkawa Ltd | 基板搬送装置 |
CN104465471A (zh) * | 2014-12-31 | 2015-03-25 | 苏州格林电子设备有限公司 | 一种硅片推片装置 |
-
1976
- 1976-11-15 JP JP13767076A patent/JPS5361978A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01239864A (ja) * | 1988-03-18 | 1989-09-25 | Shinkawa Ltd | 基板搬送装置 |
CN104465471A (zh) * | 2014-12-31 | 2015-03-25 | 苏州格林电子设备有限公司 | 一种硅片推片装置 |
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