JPS5361978A - Semiconductor wafer inspector - Google Patents

Semiconductor wafer inspector

Info

Publication number
JPS5361978A
JPS5361978A JP13767076A JP13767076A JPS5361978A JP S5361978 A JPS5361978 A JP S5361978A JP 13767076 A JP13767076 A JP 13767076A JP 13767076 A JP13767076 A JP 13767076A JP S5361978 A JPS5361978 A JP S5361978A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer inspector
wafers
inspector
pusher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13767076A
Other languages
English (en)
Inventor
Masato Fujisawa
Michifumi Ite
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13767076A priority Critical patent/JPS5361978A/ja
Publication of JPS5361978A publication Critical patent/JPS5361978A/ja
Pending legal-status Critical Current

Links

JP13767076A 1976-11-15 1976-11-15 Semiconductor wafer inspector Pending JPS5361978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13767076A JPS5361978A (en) 1976-11-15 1976-11-15 Semiconductor wafer inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13767076A JPS5361978A (en) 1976-11-15 1976-11-15 Semiconductor wafer inspector

Publications (1)

Publication Number Publication Date
JPS5361978A true JPS5361978A (en) 1978-06-02

Family

ID=15204061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13767076A Pending JPS5361978A (en) 1976-11-15 1976-11-15 Semiconductor wafer inspector

Country Status (1)

Country Link
JP (1) JPS5361978A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239864A (ja) * 1988-03-18 1989-09-25 Shinkawa Ltd 基板搬送装置
CN104465471A (zh) * 2014-12-31 2015-03-25 苏州格林电子设备有限公司 一种硅片推片装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239864A (ja) * 1988-03-18 1989-09-25 Shinkawa Ltd 基板搬送装置
CN104465471A (zh) * 2014-12-31 2015-03-25 苏州格林电子设备有限公司 一种硅片推片装置

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