JPS5357780A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5357780A
JPS5357780A JP13234276A JP13234276A JPS5357780A JP S5357780 A JPS5357780 A JP S5357780A JP 13234276 A JP13234276 A JP 13234276A JP 13234276 A JP13234276 A JP 13234276A JP S5357780 A JPS5357780 A JP S5357780A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
forsio
resists
spacers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13234276A
Other languages
English (en)
Inventor
Chiharu Kato
Kazuo Niwa
Masaharu Aoyama
Toshihiro Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13234276A priority Critical patent/JPS5357780A/ja
Publication of JPS5357780A publication Critical patent/JPS5357780A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP13234276A 1976-11-05 1976-11-05 Production of semiconductor device Pending JPS5357780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13234276A JPS5357780A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13234276A JPS5357780A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5357780A true JPS5357780A (en) 1978-05-25

Family

ID=15079085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13234276A Pending JPS5357780A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5357780A (ja)

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