JPS5355983A - Automatic micro defect detector - Google Patents

Automatic micro defect detector

Info

Publication number
JPS5355983A
JPS5355983A JP13143876A JP13143876A JPS5355983A JP S5355983 A JPS5355983 A JP S5355983A JP 13143876 A JP13143876 A JP 13143876A JP 13143876 A JP13143876 A JP 13143876A JP S5355983 A JPS5355983 A JP S5355983A
Authority
JP
Japan
Prior art keywords
defect detector
micro defect
automatic micro
test subject
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13143876A
Other languages
English (en)
Other versions
JPS5413751B2 (ja
Inventor
Hiroki Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP13143876A priority Critical patent/JPS5355983A/ja
Publication of JPS5355983A publication Critical patent/JPS5355983A/ja
Publication of JPS5413751B2 publication Critical patent/JPS5413751B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13143876A 1976-10-31 1976-10-31 Automatic micro defect detector Granted JPS5355983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13143876A JPS5355983A (en) 1976-10-31 1976-10-31 Automatic micro defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13143876A JPS5355983A (en) 1976-10-31 1976-10-31 Automatic micro defect detector

Publications (2)

Publication Number Publication Date
JPS5355983A true JPS5355983A (en) 1978-05-20
JPS5413751B2 JPS5413751B2 (ja) 1979-06-01

Family

ID=15057957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13143876A Granted JPS5355983A (en) 1976-10-31 1976-10-31 Automatic micro defect detector

Country Status (1)

Country Link
JP (1) JPS5355983A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122980A (en) * 1978-03-16 1979-09-22 Nec Corp Surface inspection unit for semiconductor pellet
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust
JPS5685834A (en) * 1979-12-17 1981-07-13 Nec Corp External appearance inspecting device for semiconductor substrate
JPS56150827A (en) * 1980-04-25 1981-11-21 Hitachi Ltd Inspection device for abnormality of mask
JPS58105152A (ja) * 1981-12-17 1983-06-22 Telmec Co Ltd フオトリソグラフイ−焼付け装置に於ける原版の塵埃除去装置
JPS58179303A (ja) * 1982-04-14 1983-10-20 Matsushita Electric Ind Co Ltd 表面微小観察装置
JPS60101942A (ja) * 1983-11-07 1985-06-06 Mitsubishi Chem Ind Ltd 単結晶表面のエツチピツトの測定方法およびそのための装置
JPS6313043A (ja) * 1986-07-04 1988-01-20 Fuji Electric Co Ltd 自動画像検査機

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122980A (en) * 1978-03-16 1979-09-22 Nec Corp Surface inspection unit for semiconductor pellet
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust
JPS5685834A (en) * 1979-12-17 1981-07-13 Nec Corp External appearance inspecting device for semiconductor substrate
JPS6246981B2 (ja) * 1979-12-17 1987-10-06 Nippon Electric Co
JPS56150827A (en) * 1980-04-25 1981-11-21 Hitachi Ltd Inspection device for abnormality of mask
JPS58105152A (ja) * 1981-12-17 1983-06-22 Telmec Co Ltd フオトリソグラフイ−焼付け装置に於ける原版の塵埃除去装置
JPS58179303A (ja) * 1982-04-14 1983-10-20 Matsushita Electric Ind Co Ltd 表面微小観察装置
JPH044526B2 (ja) * 1982-04-14 1992-01-28
JPS60101942A (ja) * 1983-11-07 1985-06-06 Mitsubishi Chem Ind Ltd 単結晶表面のエツチピツトの測定方法およびそのための装置
JPS6313043A (ja) * 1986-07-04 1988-01-20 Fuji Electric Co Ltd 自動画像検査機

Also Published As

Publication number Publication date
JPS5413751B2 (ja) 1979-06-01

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