JPS5685834A - External appearance inspecting device for semiconductor substrate - Google Patents

External appearance inspecting device for semiconductor substrate

Info

Publication number
JPS5685834A
JPS5685834A JP16377679A JP16377679A JPS5685834A JP S5685834 A JPS5685834 A JP S5685834A JP 16377679 A JP16377679 A JP 16377679A JP 16377679 A JP16377679 A JP 16377679A JP S5685834 A JPS5685834 A JP S5685834A
Authority
JP
Japan
Prior art keywords
substrate
semiconductor substrate
light rays
parallel
external appearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16377679A
Other languages
Japanese (ja)
Other versions
JPS6246981B2 (en
Inventor
Hidemi Amai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16377679A priority Critical patent/JPS5685834A/en
Publication of JPS5685834A publication Critical patent/JPS5685834A/en
Publication of JPS6246981B2 publication Critical patent/JPS6246981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To discover readily scratches on a semiconductor substrate by placing the substrate on a rotatable base, irradiating parallel or quasi-parallel light rays from any direction, and rotating the substrate. CONSTITUTION:A semiconductor substrate is placed on a rotatable base 2, and parallel or quasi-parallel light rays are irradiated to the surface of the substrate from any direction. When the base 2 is rotated and the reflected light rays from the substrate is observed with naked eyes through an observing unit 3, dirts and scratches can be readily discovered over the entire surface of the substrate without decreasing the operating efficiency, and overlooking of malfunction can be prevented.
JP16377679A 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate Granted JPS5685834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16377679A JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16377679A JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5685834A true JPS5685834A (en) 1981-07-13
JPS6246981B2 JPS6246981B2 (en) 1987-10-06

Family

ID=15780495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16377679A Granted JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5685834A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204140A (en) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド Method and device for detecting particle
JP2021046249A (en) * 2019-09-18 2021-03-25 佛山市拓▲きん▼包装有限公司 Device for inspecting product package printing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125451U (en) * 1976-03-19 1977-09-24
JPS5355983A (en) * 1976-10-31 1978-05-20 Konishiroku Photo Ind Co Ltd Automatic micro defect detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125451U (en) * 1976-03-19 1977-09-24
JPS5355983A (en) * 1976-10-31 1978-05-20 Konishiroku Photo Ind Co Ltd Automatic micro defect detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204140A (en) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド Method and device for detecting particle
JP2021046249A (en) * 2019-09-18 2021-03-25 佛山市拓▲きん▼包装有限公司 Device for inspecting product package printing

Also Published As

Publication number Publication date
JPS6246981B2 (en) 1987-10-06

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