Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP12721476ApriorityCriticalpatent/JPS5352381A/en
Publication of JPS5352381ApublicationCriticalpatent/JPS5352381A/en
PURPOSE: To prevent the decrease in the scale of integration and the laboriousness of the number of steps of production and make possible three layer wiring without fear for wiring breakage in multilayer wiring structure of an integrated circuit.
COPYRIGHT: (C)1978,JPO&Japio
JP12721476A1976-10-251976-10-25Wiring structure of semiconductor device
PendingJPS5352381A
(en)