JPS5351963A - Semiconductor wafer protective film - Google Patents

Semiconductor wafer protective film

Info

Publication number
JPS5351963A
JPS5351963A JP12697876A JP12697876A JPS5351963A JP S5351963 A JPS5351963 A JP S5351963A JP 12697876 A JP12697876 A JP 12697876A JP 12697876 A JP12697876 A JP 12697876A JP S5351963 A JPS5351963 A JP S5351963A
Authority
JP
Japan
Prior art keywords
protective film
semiconductor wafer
wafer protective
acrylicacid
dissolving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12697876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574094B2 (OSRAM
Inventor
Hiroshi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP12697876A priority Critical patent/JPS5351963A/ja
Publication of JPS5351963A publication Critical patent/JPS5351963A/ja
Publication of JPS574094B2 publication Critical patent/JPS574094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP12697876A 1976-10-21 1976-10-21 Semiconductor wafer protective film Granted JPS5351963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12697876A JPS5351963A (en) 1976-10-21 1976-10-21 Semiconductor wafer protective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12697876A JPS5351963A (en) 1976-10-21 1976-10-21 Semiconductor wafer protective film

Publications (2)

Publication Number Publication Date
JPS5351963A true JPS5351963A (en) 1978-05-11
JPS574094B2 JPS574094B2 (OSRAM) 1982-01-25

Family

ID=14948599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12697876A Granted JPS5351963A (en) 1976-10-21 1976-10-21 Semiconductor wafer protective film

Country Status (1)

Country Link
JP (1) JPS5351963A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022523709A (ja) * 2019-01-29 2022-04-26 ラム リサーチ コーポレーション 基板の環境に敏感な表面のための犠牲保護層
US12322588B2 (en) 2019-09-04 2025-06-03 Lam Research Corporation Stimulus responsive polymer films and formulations

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022523709A (ja) * 2019-01-29 2022-04-26 ラム リサーチ コーポレーション 基板の環境に敏感な表面のための犠牲保護層
US12119218B2 (en) 2019-01-29 2024-10-15 Lam Research Corporation Sacrificial protection layer for environmentally sensitive surfaces of substrates
US12322588B2 (en) 2019-09-04 2025-06-03 Lam Research Corporation Stimulus responsive polymer films and formulations

Also Published As

Publication number Publication date
JPS574094B2 (OSRAM) 1982-01-25

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