JPS574094B2 - - Google Patents
Info
- Publication number
- JPS574094B2 JPS574094B2 JP12697876A JP12697876A JPS574094B2 JP S574094 B2 JPS574094 B2 JP S574094B2 JP 12697876 A JP12697876 A JP 12697876A JP 12697876 A JP12697876 A JP 12697876A JP S574094 B2 JPS574094 B2 JP S574094B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12697876A JPS5351963A (en) | 1976-10-21 | 1976-10-21 | Semiconductor wafer protective film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12697876A JPS5351963A (en) | 1976-10-21 | 1976-10-21 | Semiconductor wafer protective film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5351963A JPS5351963A (en) | 1978-05-11 |
| JPS574094B2 true JPS574094B2 (OSRAM) | 1982-01-25 |
Family
ID=14948599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12697876A Granted JPS5351963A (en) | 1976-10-21 | 1976-10-21 | Semiconductor wafer protective film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5351963A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12119218B2 (en) | 2019-01-29 | 2024-10-15 | Lam Research Corporation | Sacrificial protection layer for environmentally sensitive surfaces of substrates |
| KR102884276B1 (ko) | 2019-09-04 | 2025-11-10 | 램 리써치 코포레이션 | 자극 반응성 중합체 (stimulus responsive polymer) 막들 및 제제들 |
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1976
- 1976-10-21 JP JP12697876A patent/JPS5351963A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5351963A (en) | 1978-05-11 |