JPS5350977A - Semiconductor surface treating agent - Google Patents
Semiconductor surface treating agentInfo
- Publication number
- JPS5350977A JPS5350977A JP12547776A JP12547776A JPS5350977A JP S5350977 A JPS5350977 A JP S5350977A JP 12547776 A JP12547776 A JP 12547776A JP 12547776 A JP12547776 A JP 12547776A JP S5350977 A JPS5350977 A JP S5350977A
- Authority
- JP
- Japan
- Prior art keywords
- treating agent
- surface treating
- semiconductor surface
- solution
- trialkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Weting (AREA)
Abstract
PURPOSE: To reduce the production of stacking faults by treating the surface of semiconductor wafers by using the solution comprising adding a surfactant to a trialkyl (hydroxy alkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12547776A JPS5350977A (en) | 1976-10-21 | 1976-10-21 | Semiconductor surface treating agent |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12547776A JPS5350977A (en) | 1976-10-21 | 1976-10-21 | Semiconductor surface treating agent |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5350977A true JPS5350977A (en) | 1978-05-09 |
JPS5540183B2 JPS5540183B2 (en) | 1980-10-16 |
Family
ID=14911047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12547776A Granted JPS5350977A (en) | 1976-10-21 | 1976-10-21 | Semiconductor surface treating agent |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5350977A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5580846A (en) * | 1994-01-28 | 1996-12-03 | Wako Pure Chemical Industries, Ltd. | Surface treating agents and treating process for semiconductors |
-
1976
- 1976-10-21 JP JP12547776A patent/JPS5350977A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5580846A (en) * | 1994-01-28 | 1996-12-03 | Wako Pure Chemical Industries, Ltd. | Surface treating agents and treating process for semiconductors |
Also Published As
Publication number | Publication date |
---|---|
JPS5540183B2 (en) | 1980-10-16 |
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